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- W2896859589 abstract "The low pressure pyrolysis of alkylmetals on conducting, semiconducting and non-conducting surfaces is studied using multiphoton and electron ionization analysis. No products of surface radical recombination (such as CH4 and C2H6) can be seen under any conditions employed. The activation energy for gas phase methyl radical production is found to be 30 kcal/mol for trimethylgallium, which is to be compared with 13 ± 2 kcal/mol observed for trimethylaluminum decomposition. A deposition mechanism is proposed to account for these observations.The low pressure pyrolysis of alkylmetals on conducting, semiconducting and non-conducting surfaces is studied using multiphoton and electron ionization analysis. No products of surface radical recombination (such as CH4 and C2H6) can be seen under any conditions employed. The activation energy for gas phase methyl radical production is found to be 30 kcal/mol for trimethylgallium, which is to be compared with 13 ± 2 kcal/mol observed for trimethylaluminum decomposition. A deposition mechanism is proposed to account for these observations." @default.
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- W2896859589 date "1985-01-01" @default.
- W2896859589 modified "2023-09-26" @default.
- W2896859589 title "Multiphoton ionization mass spectrometry as a mechanistic probe of chemical vapor deposition" @default.
- W2896859589 doi "https://doi.org/10.2351/1.5059594" @default.
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