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- W2896951410 abstract "In the present paper, the effect of thickness of the spray deposited TiO2 thin films on structural, optical and humidity sensing properties have been explored. The TiO2 thin films were successfully deposited onto glass substrate by spraying 20 ml, 40 ml and 60 ml of 0.1 M titanium trichloride solution. The X ray diffractometric (XRD) studies revealed that deposited films were polycrystalline in nature and had TiO2 with anatase phase. The variation of thickness of film showed change in crystallite size which increased with film thickness. The inverse relation between crystallite size, dislocation density and specific surface area in the films were observed. Humidity sensing properties of the synthesized samples were measured. The maximum sensitivity of 88.86% at relative humidity of 95% with smaller hysteresis was observed for sample having thickness 1508.4 ± 0.5 nm. The results of humidity sensing for all samples are discussed in this paper." @default.
- W2896951410 created "2018-10-26" @default.
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- W2896951410 date "2018-11-02" @default.
- W2896951410 modified "2023-09-26" @default.
- W2896951410 title "Effect of film thickness on humidity sensing of spray deposited TiO<sub>2</sub> thin films" @default.
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- W2896951410 doi "https://doi.org/10.1088/2053-1591/aae970" @default.
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