FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2896977694> ?p ?o ?g. }

• W2896977694 endingPage "P614" @default.
• W2896977694 startingPage "P608" @default.
• W2896977694 abstract "Co/TaN has been considered as one of the most promising candidates for barrier layers with the feature size of integrated circuit (IC) shrinking to 14 nm and below. The present work investigates the effect of chelating agent and non-ionic surfactant on Co/Cu/TaN CMP in weakly alkaline slurry without any oxidizer. The results show that TaN removal rate increases to the peak value 526 Å/min as the chelator concentration is 1ml/L. That is due to the formation of the water-soluble complex on the surface of TaN. What's more, the TaN removal rate reaches to 501 Å/min and the root mean square roughness (Sq) of TaN is 0.654 nm when non-ionic surfactant concentration is 10 ml/L under the system of 1 ml/L of the chelator. Meanwhile, by the cross-over experiment, it is when slurry is composed of 5 wt% abrasive content, 1 ml/L chelator and 10 ml/L non-ionic surfactant at pH 10 that removal selectivity of Co:Cu and TaN:Cu are comparatively higher and closer (Co:Cu∼2.74:1, TaN:Cu∼2.61:1) along with a good surface quality is obtained." @default.
• W2896977694 created "2018-10-26" @default.
• W2896977694 creator A5001815311 @default.
• W2896977694 creator A5022650264 @default.
• W2896977694 creator A5041608565 @default.
• W2896977694 creator A5045537572 @default.
• W2896977694 creator A5051053420 @default.
• W2896977694 creator A5080412905 @default.
• W2896977694 creator A5081867046 @default.
• W2896977694 date "2018-01-01" @default.
• W2896977694 modified "2023-10-16" @default.
• W2896977694 title "Effect of Chelating Agent and Surfactant on TaN CMP in Weakly Alkaline Slurry" @default.
• W2896977694 cites W1966936480 @default.
• W2896977694 cites W1979791029 @default.
• W2896977694 cites W1990304133 @default.
• W2896977694 cites W1993880693 @default.
• W2896977694 cites W1998283174 @default.
• W2896977694 cites W2004909123 @default.
• W2896977694 cites W2014649041 @default.
• W2896977694 cites W2026880666 @default.
• W2896977694 cites W2029222111 @default.
• W2896977694 cites W2034417304 @default.
• W2896977694 cites W2044108992 @default.
• W2896977694 cites W2048615411 @default.
• W2896977694 cites W2051693263 @default.
• W2896977694 cites W2054996255 @default.
• W2896977694 cites W2069940806 @default.
• W2896977694 cites W2081599193 @default.
• W2896977694 cites W2084628975 @default.
• W2896977694 cites W2275885572 @default.
• W2896977694 cites W2318451531 @default.
• W2896977694 cites W2321516744 @default.
• W2896977694 cites W2346992073 @default.
• W2896977694 cites W2509928107 @default.
• W2896977694 cites W2542435556 @default.
• W2896977694 cites W2557572125 @default.
• W2896977694 cites W2601045437 @default.
• W2896977694 cites W2601532373 @default.
• W2896977694 cites W2808839735 @default.
• W2896977694 doi "https://doi.org/10.1149/2.0071811jss" @default.
• W2896977694 hasPublicationYear "2018" @default.
• W2896977694 type Work @default.
• W2896977694 sameAs 2896977694 @default.
• W2896977694 citedByCount "3" @default.
• W2896977694 countsByYear W28969776942019 @default.
• W2896977694 countsByYear W28969776942022 @default.
• W2896977694 crossrefType "journal-article" @default.
• W2896977694 hasAuthorship W2896977694A5001815311 @default.
• W2896977694 hasAuthorship W2896977694A5022650264 @default.
• W2896977694 hasAuthorship W2896977694A5041608565 @default.
• W2896977694 hasAuthorship W2896977694A5045537572 @default.
• W2896977694 hasAuthorship W2896977694A5051053420 @default.
• W2896977694 hasAuthorship W2896977694A5080412905 @default.
• W2896977694 hasAuthorship W2896977694A5081867046 @default.
• W2896977694 hasConcept C107365816 @default.
• W2896977694 hasConcept C113196181 @default.
• W2896977694 hasConcept C127413603 @default.
• W2896977694 hasConcept C13965031 @default.
• W2896977694 hasConcept C159985019 @default.
• W2896977694 hasConcept C178790620 @default.
• W2896977694 hasConcept C184651966 @default.
• W2896977694 hasConcept C185592680 @default.
• W2896977694 hasConcept C187428577 @default.
• W2896977694 hasConcept C191897082 @default.
• W2896977694 hasConcept C192562407 @default.
• W2896977694 hasConcept C197404232 @default.
• W2896977694 hasConcept C42360764 @default.
• W2896977694 hasConcept C43617362 @default.
• W2896977694 hasConcept C58226133 @default.
• W2896977694 hasConcept C94293008 @default.
• W2896977694 hasConceptScore W2896977694C107365816 @default.
• W2896977694 hasConceptScore W2896977694C113196181 @default.
• W2896977694 hasConceptScore W2896977694C127413603 @default.
• W2896977694 hasConceptScore W2896977694C13965031 @default.
• W2896977694 hasConceptScore W2896977694C159985019 @default.
• W2896977694 hasConceptScore W2896977694C178790620 @default.
• W2896977694 hasConceptScore W2896977694C184651966 @default.
• W2896977694 hasConceptScore W2896977694C185592680 @default.
• W2896977694 hasConceptScore W2896977694C187428577 @default.
• W2896977694 hasConceptScore W2896977694C191897082 @default.
• W2896977694 hasConceptScore W2896977694C192562407 @default.
• W2896977694 hasConceptScore W2896977694C197404232 @default.
• W2896977694 hasConceptScore W2896977694C42360764 @default.
• W2896977694 hasConceptScore W2896977694C43617362 @default.
• W2896977694 hasConceptScore W2896977694C58226133 @default.
• W2896977694 hasConceptScore W2896977694C94293008 @default.
• W2896977694 hasIssue "11" @default.
• W2896977694 hasLocation W28969776941 @default.
• W2896977694 hasOpenAccess W2896977694 @default.
• W2896977694 hasPrimaryLocation W28969776941 @default.
• W2896977694 hasRelatedWork W1570392672 @default.
• W2896977694 hasRelatedWork W1787176442 @default.
• W2896977694 hasRelatedWork W1977329809 @default.
• W2896977694 hasRelatedWork W1985596875 @default.
• W2896977694 hasRelatedWork W2010867980 @default.
• W2896977694 hasRelatedWork W2142360195 @default.
• W2896977694 hasRelatedWork W2154432709 @default.
• W2896977694 hasRelatedWork W2352097377 @default.

• next