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- W2897005111 abstract "Thin films of hafnium oxide (HfO2) deposited by atomic layer deposition (ALD) have been studied extensively as a high-k replacement for the SiO2 gate in field effect transistors. The use of ALD process allows one to grow homogeneous thin films at low temperatures with a precise control of thickness [1]. Some important electrical considerations for the application of a high-k dielectric include the presence of fixed charge (Qf) and charge trapping in the dielectric. For instance, in the case of Al2O3 thin films deposited on Si, the thickness of the interfacial SiO2 layer was identified as a key fundamental parameter determining Qf [2]. A similar trend can be also expected in HfO2/Si structures. Therefore, in this work, we proposed an in situ evaluation of photon induced charge trapping in HfO2 films deposited on SiO2/Si structures. For that, tetrakis-di-methyl-amino-hafnium (TDMAHf) and H2O were employed as precursors to deposit HfO2 films on SiO2/Si samples with variable thickness of the SiO2 interlayer. Measurements were performed by Synchrotron Radiation Photoemission Spectroscopy (SR-PES). Results indicated that the charging process is dependent on the thickness of the SiO2 interlayer and on the quality of the HfO2 film. [1] M. Leskela and M. Ritala, Thin Solid Films 409, 138 (2002). [2] G. Dingemans et al., J. Appl. Phys. 110, 093715 (2011)." @default.
- W2897005111 created "2018-10-26" @default.
- W2897005111 creator A5004405466 @default.
- W2897005111 creator A5018672772 @default.
- W2897005111 creator A5064592665 @default.
- W2897005111 creator A5085006127 @default.
- W2897005111 date "2014-01-01" @default.
- W2897005111 modified "2023-09-26" @default.
- W2897005111 title "Charging effect in HfO2 films deposited on SiO2/Si by atomic layer deposition" @default.
- W2897005111 hasPublicationYear "2014" @default.
- W2897005111 type Work @default.
- W2897005111 sameAs 2897005111 @default.
- W2897005111 citedByCount "0" @default.
- W2897005111 crossrefType "journal-article" @default.
- W2897005111 hasAuthorship W2897005111A5004405466 @default.
- W2897005111 hasAuthorship W2897005111A5018672772 @default.
- W2897005111 hasAuthorship W2897005111A5064592665 @default.
- W2897005111 hasAuthorship W2897005111A5085006127 @default.
- W2897005111 hasConcept C113196181 @default.
- W2897005111 hasConcept C127413603 @default.
- W2897005111 hasConcept C133386390 @default.
- W2897005111 hasConcept C151730666 @default.
- W2897005111 hasConcept C16317505 @default.
- W2897005111 hasConcept C171250308 @default.
- W2897005111 hasConcept C175708663 @default.
- W2897005111 hasConcept C185592680 @default.
- W2897005111 hasConcept C19067145 @default.
- W2897005111 hasConcept C191897082 @default.
- W2897005111 hasConcept C192562407 @default.
- W2897005111 hasConcept C2779227376 @default.
- W2897005111 hasConcept C2816523 @default.
- W2897005111 hasConcept C42360764 @default.
- W2897005111 hasConcept C43617362 @default.
- W2897005111 hasConcept C49040817 @default.
- W2897005111 hasConcept C534791751 @default.
- W2897005111 hasConcept C546638069 @default.
- W2897005111 hasConcept C64297162 @default.
- W2897005111 hasConcept C69544855 @default.
- W2897005111 hasConcept C86803240 @default.
- W2897005111 hasConceptScore W2897005111C113196181 @default.
- W2897005111 hasConceptScore W2897005111C127413603 @default.
- W2897005111 hasConceptScore W2897005111C133386390 @default.
- W2897005111 hasConceptScore W2897005111C151730666 @default.
- W2897005111 hasConceptScore W2897005111C16317505 @default.
- W2897005111 hasConceptScore W2897005111C171250308 @default.
- W2897005111 hasConceptScore W2897005111C175708663 @default.
- W2897005111 hasConceptScore W2897005111C185592680 @default.
- W2897005111 hasConceptScore W2897005111C19067145 @default.
- W2897005111 hasConceptScore W2897005111C191897082 @default.
- W2897005111 hasConceptScore W2897005111C192562407 @default.
- W2897005111 hasConceptScore W2897005111C2779227376 @default.
- W2897005111 hasConceptScore W2897005111C2816523 @default.
- W2897005111 hasConceptScore W2897005111C42360764 @default.
- W2897005111 hasConceptScore W2897005111C43617362 @default.
- W2897005111 hasConceptScore W2897005111C49040817 @default.
- W2897005111 hasConceptScore W2897005111C534791751 @default.
- W2897005111 hasConceptScore W2897005111C546638069 @default.
- W2897005111 hasConceptScore W2897005111C64297162 @default.
- W2897005111 hasConceptScore W2897005111C69544855 @default.
- W2897005111 hasConceptScore W2897005111C86803240 @default.
- W2897005111 hasLocation W28970051111 @default.
- W2897005111 hasOpenAccess W2897005111 @default.
- W2897005111 hasPrimaryLocation W28970051111 @default.
- W2897005111 hasRelatedWork W1968982848 @default.
- W2897005111 hasRelatedWork W1974878869 @default.
- W2897005111 hasRelatedWork W1975576540 @default.
- W2897005111 hasRelatedWork W1991526314 @default.
- W2897005111 hasRelatedWork W2001410963 @default.
- W2897005111 hasRelatedWork W2010267318 @default.
- W2897005111 hasRelatedWork W2022217622 @default.
- W2897005111 hasRelatedWork W2025898815 @default.
- W2897005111 hasRelatedWork W2047320698 @default.
- W2897005111 hasRelatedWork W2053856866 @default.
- W2897005111 hasRelatedWork W2067408897 @default.
- W2897005111 hasRelatedWork W2126993916 @default.
- W2897005111 hasRelatedWork W2316589876 @default.
- W2897005111 hasRelatedWork W2324356656 @default.
- W2897005111 hasRelatedWork W2558306557 @default.
- W2897005111 hasRelatedWork W2624816382 @default.
- W2897005111 hasRelatedWork W2788981194 @default.
- W2897005111 hasRelatedWork W2901002660 @default.
- W2897005111 hasRelatedWork W295404395 @default.
- W2897005111 hasRelatedWork W3092142580 @default.
- W2897005111 isParatext "false" @default.
- W2897005111 isRetracted "false" @default.
- W2897005111 magId "2897005111" @default.
- W2897005111 workType "article" @default.