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- W2897020807 abstract "High accuracy interferometric position measurement requires that the axis of motion be parallel to the laser beam axis in the measuring leg of the interferometer. If this is not the case, an error is introduced which is proportional to the cosine of the angle between the two axes. This paper describes a method for determining the angle to a high degree of accuracy so that a correction for the error can be made. The technique is applicable to those situations where it is impossible to precisely align the interferometer prior to the measurement.High accuracy interferometric position measurement requires that the axis of motion be parallel to the laser beam axis in the measuring leg of the interferometer. If this is not the case, an error is introduced which is proportional to the cosine of the angle between the two axes. This paper describes a method for determining the angle to a high degree of accuracy so that a correction for the error can be made. The technique is applicable to those situations where it is impossible to precisely align the interferometer prior to the measurement." @default.
- W2897020807 created "2018-10-26" @default.
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- W2897020807 date "1985-01-01" @default.
- W2897020807 modified "2023-09-27" @default.
- W2897020807 title "Compensation for cosine errors in interferometric position measurement by means of digital image correlation" @default.
- W2897020807 doi "https://doi.org/10.2351/1.5059601" @default.
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