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- W2897079138 abstract "In scanning electron microscopy, electromagnetic distortion is one of the main causes of pattern distortion. This distortion typically manifests as periodic vibration at high frequency scanning speeds. The article establishes a model for describing the pattern distortion when the edge of the sample is inconsistent with the scanning direction. As the basis for distortion solutions." @default.
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- W2897079138 date "2018-08-01" @default.
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- W2897079138 title "SEM Image Distortion Measurement Based on Silver Nanowires" @default.
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- W2897079138 doi "https://doi.org/10.1088/1742-6596/1077/1/012006" @default.
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