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- W2897215304 abstract "Abstract Herein we study theoretically and experimentally the role of the carbon element as an etching mask for ion beam exposure. We explore the removal of the C-FEBID remaining after the ion exposure applying an oxygen assisted electron beam irradiation process. Pattern transferred combining both processes, C-FEBID etching mask and C-FEBID removal, is a versatile route that avoids the presence of residual contaminants on patterned structures and it can be realized in a single tool without sample transfer or exposure to ambient air." @default.
- W2897215304 created "2018-10-26" @default.
- W2897215304 creator A5012599038 @default.
- W2897215304 creator A5026114457 @default.
- W2897215304 creator A5090490084 @default.
- W2897215304 date "2018-12-01" @default.
- W2897215304 modified "2023-09-26" @default.
- W2897215304 title "C-FEBID etching mask and C-FEBID in-situ removal; enabling a new micro- and nano fabrication route" @default.
- W2897215304 cites W1971596937 @default.
- W2897215304 cites W1971728643 @default.
- W2897215304 cites W1973381743 @default.
- W2897215304 cites W1985386248 @default.
- W2897215304 cites W2044893383 @default.
- W2897215304 cites W2045309858 @default.
- W2897215304 cites W2047491557 @default.
- W2897215304 cites W2063933901 @default.
- W2897215304 cites W2092099121 @default.
- W2897215304 cites W2178590711 @default.
- W2897215304 cites W2213948507 @default.
- W2897215304 cites W2239651618 @default.
- W2897215304 cites W2402386783 @default.
- W2897215304 cites W2418472979 @default.
- W2897215304 cites W2555114999 @default.
- W2897215304 cites W2608695311 @default.
- W2897215304 doi "https://doi.org/10.1016/j.mee.2018.10.003" @default.
- W2897215304 hasPublicationYear "2018" @default.
- W2897215304 type Work @default.
- W2897215304 sameAs 2897215304 @default.
- W2897215304 citedByCount "0" @default.
- W2897215304 crossrefType "journal-article" @default.
- W2897215304 hasAuthorship W2897215304A5012599038 @default.
- W2897215304 hasAuthorship W2897215304A5026114457 @default.
- W2897215304 hasAuthorship W2897215304A5090490084 @default.
- W2897215304 hasConcept C100460472 @default.
- W2897215304 hasConcept C136525101 @default.
- W2897215304 hasConcept C142724271 @default.
- W2897215304 hasConcept C159985019 @default.
- W2897215304 hasConcept C171250308 @default.
- W2897215304 hasConcept C185592680 @default.
- W2897215304 hasConcept C192562407 @default.
- W2897215304 hasConcept C204787440 @default.
- W2897215304 hasConcept C2779227376 @default.
- W2897215304 hasConcept C2780357685 @default.
- W2897215304 hasConcept C71924100 @default.
- W2897215304 hasConceptScore W2897215304C100460472 @default.
- W2897215304 hasConceptScore W2897215304C136525101 @default.
- W2897215304 hasConceptScore W2897215304C142724271 @default.
- W2897215304 hasConceptScore W2897215304C159985019 @default.
- W2897215304 hasConceptScore W2897215304C171250308 @default.
- W2897215304 hasConceptScore W2897215304C185592680 @default.
- W2897215304 hasConceptScore W2897215304C192562407 @default.
- W2897215304 hasConceptScore W2897215304C204787440 @default.
- W2897215304 hasConceptScore W2897215304C2779227376 @default.
- W2897215304 hasConceptScore W2897215304C2780357685 @default.
- W2897215304 hasConceptScore W2897215304C71924100 @default.
- W2897215304 hasLocation W28972153041 @default.
- W2897215304 hasOpenAccess W2897215304 @default.
- W2897215304 hasPrimaryLocation W28972153041 @default.
- W2897215304 hasRelatedWork W2126246984 @default.
- W2897215304 hasRelatedWork W2322197603 @default.
- W2897215304 hasRelatedWork W2331163652 @default.
- W2897215304 hasRelatedWork W2547567365 @default.
- W2897215304 hasRelatedWork W2788158635 @default.
- W2897215304 hasRelatedWork W2995001411 @default.
- W2897215304 hasRelatedWork W3005362658 @default.
- W2897215304 hasRelatedWork W3163267074 @default.
- W2897215304 hasRelatedWork W3205101185 @default.
- W2897215304 hasRelatedWork W4241262190 @default.
- W2897215304 isParatext "false" @default.
- W2897215304 isRetracted "false" @default.
- W2897215304 magId "2897215304" @default.
- W2897215304 workType "article" @default.