FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2897215953> ?p ?o ?g. }

• W2897215953 abstract "The disk resonator gyroscope is an attractive candidate for high-performance MEMS gyroscopes. This gyroscope consists of a sensor and readout electronics, and the characteristics of the sensor directly determine the performance. For the sensor, a high-quality factor and long decaying time constant are the most important characteristics required to achieve high performance. We report a disk resonator gyroscope with a measured quality factor of 510 k and decaying time constant of 74.9 s, which is a record for MEMS silicon disk resonator gyroscopes, to the best of our knowledge. To improve the quality factor of the DRG, the quality factor improvement mechanism is first analyzed, and based on this mechanism two stiffness-mass decoupled methods, i.e., spoke length distribution optimization and lumped mass configuration design, are proposed and demonstrated. A disk resonator gyroscope prototype is fabricated based on these design strategies, and the sensor itself shows an angle random walk as low as 0.001°/√h, demonstrating true potential to achieve navigation-grade performance. The gyroscope with readout electronics shows an angle random walk of 0.01°/√h and a bias instability of 0.04°/h at room temperature without compensation, revealing that the performance of the gyroscope is severely limited by the readout electronics, which should be further improved. We expect that the quality factor improvement methods can be used in the design of other MEMS gyroscopes and that the newly designed DRG can be further improved to achieve navigation-grade performances for high-end industrial, transportation, aerospace, and automotive applications." @default.
• W2897215953 created "2018-10-26" @default.
• W2897215953 creator A5013249424 @default.
• W2897215953 creator A5018426574 @default.
• W2897215953 creator A5039180109 @default.
• W2897215953 creator A5049117338 @default.
• W2897215953 creator A5070692281 @default.
• W2897215953 creator A5082087404 @default.
• W2897215953 creator A5085245429 @default.
• W2897215953 creator A5088123383 @default.
• W2897215953 creator A5088900085 @default.
• W2897215953 date "2018-11-19" @default.
• W2897215953 modified "2023-10-14" @default.
• W2897215953 title "0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant (74.9 s)" @default.
• W2897215953 cites W1541128459 @default.
• W2897215953 cites W1965274759 @default.
• W2897215953 cites W1972951425 @default.
• W2897215953 cites W1982183794 @default.
• W2897215953 cites W2018612013 @default.
• W2897215953 cites W2028969753 @default.
• W2897215953 cites W2040985408 @default.
• W2897215953 cites W2042548359 @default.
• W2897215953 cites W2055430408 @default.
• W2897215953 cites W2063269453 @default.
• W2897215953 cites W2066745696 @default.
• W2897215953 cites W2082468165 @default.
• W2897215953 cites W2091599446 @default.
• W2897215953 cites W2097296443 @default.
• W2897215953 cites W2108692808 @default.
• W2897215953 cites W2146883569 @default.
• W2897215953 cites W2164477080 @default.
• W2897215953 cites W2169433385 @default.
• W2897215953 cites W2175819383 @default.
• W2897215953 cites W2182323679 @default.
• W2897215953 cites W2212130624 @default.
• W2897215953 cites W2290880381 @default.
• W2897215953 cites W2311059696 @default.
• W2897215953 cites W2327316753 @default.
• W2897215953 cites W2343925558 @default.
• W2897215953 cites W2362274869 @default.
• W2897215953 cites W2418712493 @default.
• W2897215953 cites W2466745998 @default.
• W2897215953 cites W2514025835 @default.
• W2897215953 cites W2593390051 @default.
• W2897215953 cites W2620941039 @default.
• W2897215953 cites W2743171362 @default.
• W2897215953 cites W2782922262 @default.
• W2897215953 cites W2783673061 @default.
• W2897215953 cites W2930039044 @default.
• W2897215953 doi "https://doi.org/10.1038/s41378-018-0035-0" @default.
• W2897215953 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/6240575" @default.
• W2897215953 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/31057920" @default.
• W2897215953 hasPublicationYear "2018" @default.
• W2897215953 type Work @default.
• W2897215953 sameAs 2897215953 @default.
• W2897215953 citedByCount "77" @default.
• W2897215953 countsByYear W28972159532019 @default.
• W2897215953 countsByYear W28972159532020 @default.
• W2897215953 countsByYear W28972159532021 @default.
• W2897215953 countsByYear W28972159532022 @default.
• W2897215953 countsByYear W28972159532023 @default.
• W2897215953 crossrefType "journal-article" @default.
• W2897215953 hasAuthorship W2897215953A5013249424 @default.
• W2897215953 hasAuthorship W2897215953A5018426574 @default.
• W2897215953 hasAuthorship W2897215953A5039180109 @default.
• W2897215953 hasAuthorship W2897215953A5049117338 @default.
• W2897215953 hasAuthorship W2897215953A5070692281 @default.
• W2897215953 hasAuthorship W2897215953A5082087404 @default.
• W2897215953 hasAuthorship W2897215953A5085245429 @default.
• W2897215953 hasAuthorship W2897215953A5088123383 @default.
• W2897215953 hasAuthorship W2897215953A5088900085 @default.
• W2897215953 hasBestOaLocation W28972159531 @default.
• W2897215953 hasConcept C119599485 @default.
• W2897215953 hasConcept C121332964 @default.
• W2897215953 hasConcept C127413603 @default.
• W2897215953 hasConcept C138331895 @default.
• W2897215953 hasConcept C146978453 @default.
• W2897215953 hasConcept C158488048 @default.
• W2897215953 hasConcept C187725362 @default.
• W2897215953 hasConcept C199360897 @default.
• W2897215953 hasConcept C24326235 @default.
• W2897215953 hasConcept C2777027219 @default.
• W2897215953 hasConcept C2779530757 @default.
• W2897215953 hasConcept C37977207 @default.
• W2897215953 hasConcept C41008148 @default.
• W2897215953 hasConcept C49040817 @default.
• W2897215953 hasConcept C62520636 @default.
• W2897215953 hasConcept C72768775 @default.
• W2897215953 hasConcept C97126364 @default.
• W2897215953 hasConceptScore W2897215953C119599485 @default.
• W2897215953 hasConceptScore W2897215953C121332964 @default.
• W2897215953 hasConceptScore W2897215953C127413603 @default.
• W2897215953 hasConceptScore W2897215953C138331895 @default.
• W2897215953 hasConceptScore W2897215953C146978453 @default.
• W2897215953 hasConceptScore W2897215953C158488048 @default.
• W2897215953 hasConceptScore W2897215953C187725362 @default.
• W2897215953 hasConceptScore W2897215953C199360897 @default.
• W2897215953 hasConceptScore W2897215953C24326235 @default.
• W2897215953 hasConceptScore W2897215953C2777027219 @default.
• W2897215953 hasConceptScore W2897215953C2779530757 @default.

• next