FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2897317727> ?p ?o ?g. }

• W2897317727 endingPage "896" @default.
• W2897317727 startingPage "896" @default.
• W2897317727 abstract "The present study investigated the influence of nanoscale residual stress depth gradients on the nano-mechanical behavior and adhesion energy of aluminium nitride (AlN) and Al/AlN sputtered thin films on a (100) silicon substrate. By using a focused ion beam (FIB) incremental ring-core method, the residual stress depth gradient was assessed in the films in comparison with standard curvature residual stress measurements. The adhesion energy was then quantified by using a nanoindentation-based model. Results showed that the addition of an aluminum layer gave rise to additional tensile stress at the coating/substrate interface, which can be explained in terms of the differences of thermal expansion coefficients with the silicon substrate. Therefore, the coatings without the Al layer showed better adhesion because of a more homogeneous compressive residual stress in comparison with the coating having the Al layer, even though both groups of coatings were produced under the same bias voltage. Results are discussed, and some general suggestions are made on the correlation between coating/substrate property combinations and the adhesion energy of multilayer stacks. The results suggested that the Al bond layer and inhomogeneous residual stresses negatively affected the adhesion of AlN to a substrate such as silicon." @default.
• W2897317727 created "2018-10-26" @default.
• W2897317727 creator A5006582626 @default.
• W2897317727 creator A5041509917 @default.
• W2897317727 creator A5056654440 @default.
• W2897317727 creator A5079440886 @default.
• W2897317727 creator A5087504804 @default.
• W2897317727 date "2018-11-01" @default.
• W2897317727 modified "2023-09-26" @default.
• W2897317727 title "Effects of Residual Stress Distribution on Interfacial Adhesion of Magnetron Sputtered AlN and AlN/Al Nanostructured Coatings on a (100) Silicon Substrate" @default.
• W2897317727 cites W1988267188 @default.
• W2897317727 cites W1989360826 @default.
• W2897317727 cites W1999363248 @default.
• W2897317727 cites W2004756525 @default.
• W2897317727 cites W2010618356 @default.
• W2897317727 cites W2010910789 @default.
• W2897317727 cites W2019131424 @default.
• W2897317727 cites W2026088305 @default.
• W2897317727 cites W2036919412 @default.
• W2897317727 cites W2042409606 @default.
• W2897317727 cites W2043237080 @default.
• W2897317727 cites W2056344661 @default.
• W2897317727 cites W2066874036 @default.
• W2897317727 cites W2067671800 @default.
• W2897317727 cites W2068616663 @default.
• W2897317727 cites W2078450525 @default.
• W2897317727 cites W2082067618 @default.
• W2897317727 cites W2086933933 @default.
• W2897317727 cites W2127954149 @default.
• W2897317727 cites W2131356921 @default.
• W2897317727 cites W2141808559 @default.
• W2897317727 cites W2147927746 @default.
• W2897317727 cites W2158138011 @default.
• W2897317727 cites W2522850177 @default.
• W2897317727 cites W2564008384 @default.
• W2897317727 cites W2738782231 @default.
• W2897317727 cites W2748345406 @default.
• W2897317727 cites W2762477834 @default.
• W2897317727 cites W2789517172 @default.
• W2897317727 cites W2791282996 @default.
• W2897317727 doi "https://doi.org/10.3390/nano8110896" @default.
• W2897317727 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/6266410" @default.
• W2897317727 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/30388839" @default.
• W2897317727 hasPublicationYear "2018" @default.
• W2897317727 type Work @default.
• W2897317727 sameAs 2897317727 @default.
• W2897317727 citedByCount "18" @default.
• W2897317727 countsByYear W28973177272019 @default.
• W2897317727 countsByYear W28973177272020 @default.
• W2897317727 countsByYear W28973177272021 @default.
• W2897317727 countsByYear W28973177272022 @default.
• W2897317727 countsByYear W28973177272023 @default.
• W2897317727 crossrefType "journal-article" @default.
• W2897317727 hasAuthorship W2897317727A5006582626 @default.
• W2897317727 hasAuthorship W2897317727A5041509917 @default.
• W2897317727 hasAuthorship W2897317727A5056654440 @default.
• W2897317727 hasAuthorship W2897317727A5079440886 @default.
• W2897317727 hasAuthorship W2897317727A5087504804 @default.
• W2897317727 hasBestOaLocation W28973177271 @default.
• W2897317727 hasConcept C111368507 @default.
• W2897317727 hasConcept C127313418 @default.
• W2897317727 hasConcept C138885662 @default.
• W2897317727 hasConcept C159985019 @default.
• W2897317727 hasConcept C171250308 @default.
• W2897317727 hasConcept C19067145 @default.
• W2897317727 hasConcept C191897082 @default.
• W2897317727 hasConcept C192562407 @default.
• W2897317727 hasConcept C21036866 @default.
• W2897317727 hasConcept C22423302 @default.
• W2897317727 hasConcept C2777289219 @default.
• W2897317727 hasConcept C2779227376 @default.
• W2897317727 hasConcept C2781448156 @default.
• W2897317727 hasConcept C37292000 @default.
• W2897317727 hasConcept C41895202 @default.
• W2897317727 hasConcept C49326732 @default.
• W2897317727 hasConcept C544956773 @default.
• W2897317727 hasConcept C61427134 @default.
• W2897317727 hasConceptScore W2897317727C111368507 @default.
• W2897317727 hasConceptScore W2897317727C127313418 @default.
• W2897317727 hasConceptScore W2897317727C138885662 @default.
• W2897317727 hasConceptScore W2897317727C159985019 @default.
• W2897317727 hasConceptScore W2897317727C171250308 @default.
• W2897317727 hasConceptScore W2897317727C19067145 @default.
• W2897317727 hasConceptScore W2897317727C191897082 @default.
• W2897317727 hasConceptScore W2897317727C192562407 @default.
• W2897317727 hasConceptScore W2897317727C21036866 @default.
• W2897317727 hasConceptScore W2897317727C22423302 @default.
• W2897317727 hasConceptScore W2897317727C2777289219 @default.
• W2897317727 hasConceptScore W2897317727C2779227376 @default.
• W2897317727 hasConceptScore W2897317727C2781448156 @default.
• W2897317727 hasConceptScore W2897317727C37292000 @default.
• W2897317727 hasConceptScore W2897317727C41895202 @default.
• W2897317727 hasConceptScore W2897317727C49326732 @default.
• W2897317727 hasConceptScore W2897317727C544956773 @default.
• W2897317727 hasConceptScore W2897317727C61427134 @default.
• W2897317727 hasIssue "11" @default.
• W2897317727 hasLocation W28973177271 @default.
• W2897317727 hasLocation W28973177272 @default.

• next