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- W2897526095 abstract "In the industrial production of electrical, optical and micro-mechanical components progress in miniaturisation requires improved adjusting techniques. Sub-micrometer accuracy adjustment must be obtained within a second and the accuracy should be stable for many years. All methods that are presently applied for micro-manipulation are time-consuming and tedious and require very expensive equipment. They also often can not be automated. The present paper shows a new technology, laser beam forming, for adjustment purpose in the submicron range. Two examples for applications will be given. A new field of activity for laser technology is described.In the industrial production of electrical, optical and micro-mechanical components progress in miniaturisation requires improved adjusting techniques. Sub-micrometer accuracy adjustment must be obtained within a second and the accuracy should be stable for many years. All methods that are presently applied for micro-manipulation are time-consuming and tedious and require very expensive equipment. They also often can not be automated. The present paper shows a new technology, laser beam forming, for adjustment purpose in the submicron range. Two examples for applications will be given. A new field of activity for laser technology is described." @default.
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- W2897526095 date "1998-01-01" @default.
- W2897526095 modified "2023-09-26" @default.
- W2897526095 title "Laser beam micro-forming – A new technology" @default.
- W2897526095 doi "https://doi.org/10.2351/1.5059156" @default.
- W2897526095 hasPublicationYear "1998" @default.
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