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- W2897541258 abstract "Excimer lasers can be applied to the micro-channel processing on the Polymethyl Methacrylate (PMMA) material. PMMA is known as a main material for the polymer biochips and shows a property of the good absorptivity on the excimer laser. In this paper, a Self-developed excimer laser zoom-lens-processing-system is applied to process the continuous variance width-transformation’s mirco-channel on PMMA. Firstly, the roughness of processed zone on PMMA samples are studied vs different sample translation speed and excimer laser energy respectively. Secondly, the relationship between the lens group zoom ratio and the width of the micro-channel is discussed. And possible improvements for the qualities of processing smoothness are further discussed based on the analysis of the relationship between the smoothness of mirco-channel’s edge and the processing speed.Excimer lasers can be applied to the micro-channel processing on the Polymethyl Methacrylate (PMMA) material. PMMA is known as a main material for the polymer biochips and shows a property of the good absorptivity on the excimer laser. In this paper, a Self-developed excimer laser zoom-lens-processing-system is applied to process the continuous variance width-transformation’s mirco-channel on PMMA. Firstly, the roughness of processed zone on PMMA samples are studied vs different sample translation speed and excimer laser energy respectively. Secondly, the relationship between the lens group zoom ratio and the width of the micro-channel is discussed. And possible improvements for the qualities of processing smoothness are further discussed based on the analysis of the relationship between the smoothness of mirco-channel’s edge and the processing speed." @default.
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- W2897541258 date "2011-01-01" @default.
- W2897541258 modified "2023-09-27" @default.
- W2897541258 title "Research of the connection of excimer laser zoom-processing condition to the pmma micro-channel’s edge-smoothness and roughness" @default.
- W2897541258 doi "https://doi.org/10.2351/1.5062198" @default.
- W2897541258 hasPublicationYear "2011" @default.
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