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- W2897562191 abstract "In this paper, an internal model-based tuning scheme of oscillation caused by underdamping characteristic of deflection mechanism in electromagnetic MEMS micro-mirrors. In this scheme, an approximated resonant compensator for suppressing the oscillation of micro-mirror is introduced. Then, an internal model-based tuning scheme with robust design is implemented to the angular tuning of electromagnetic micro-mirror. The experiments on an electromagnetically actuated micro-mirror are implemented for evaluation of the proposed tuning approach." @default.
- W2897562191 created "2018-10-26" @default.
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- W2897562191 date "2018-07-01" @default.
- W2897562191 modified "2023-10-06" @default.
- W2897562191 title "An Angle Tuning Method of MEMS Micro-Mirror" @default.
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- W2897562191 doi "https://doi.org/10.23919/chicc.2018.8483395" @default.
- W2897562191 hasPublicationYear "2018" @default.
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