Matches in SemOpenAlex for { <https://semopenalex.org/work/W2897623920> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W2897623920 abstract "Maskless patterning techniques are increasingly implemented in materials research and manufacturing eliminating the need for masks or masters. Recent utilization of these techniques for biological patterning demonstrates the potential for successful application in various fields. We present a new lithographic process, dynamic maskless holographic lithography (DMHL), for the real-time configuration and arbitrary positioning of light intensity patterns using computer-generated phase holograms. We utilize a spatial light modulator (SLM), an electrically addressed diffractive optical element, to display phase holograms and direct light through an optical system. The phase holograms represent the Fourier transform of desired images and modulate incident light to reproduce the images in the focal plane of a microscope. The advantage of DMHL over other maskless techniques is the ability to perform serial and single-shot pattern transfer using a single instrument. The incorporation of a holographic offset also offers additional positioning and parallel processing capabilities. DMHL provides a rapidly adaptable and configurable system for many lithographic applications.Maskless patterning techniques are increasingly implemented in materials research and manufacturing eliminating the need for masks or masters. Recent utilization of these techniques for biological patterning demonstrates the potential for successful application in various fields. We present a new lithographic process, dynamic maskless holographic lithography (DMHL), for the real-time configuration and arbitrary positioning of light intensity patterns using computer-generated phase holograms. We utilize a spatial light modulator (SLM), an electrically addressed diffractive optical element, to display phase holograms and direct light through an optical system. The phase holograms represent the Fourier transform of desired images and modulate incident light to reproduce the images in the focal plane of a microscope. The advantage of DMHL over other maskless techniques is the ability to perform serial and single-shot pattern transfer using a single instrument. The incorporation of a holographic offset also of..." @default.
- W2897623920 created "2018-10-26" @default.
- W2897623920 creator A5046464822 @default.
- W2897623920 creator A5046706945 @default.
- W2897623920 creator A5067372077 @default.
- W2897623920 date "2007-01-01" @default.
- W2897623920 modified "2023-09-25" @default.
- W2897623920 title "Application of dynamic maskless holographic lithography" @default.
- W2897623920 doi "https://doi.org/10.2351/1.5061165" @default.
- W2897623920 hasPublicationYear "2007" @default.
- W2897623920 type Work @default.
- W2897623920 sameAs 2897623920 @default.
- W2897623920 citedByCount "0" @default.
- W2897623920 crossrefType "proceedings-article" @default.
- W2897623920 hasAuthorship W2897623920A5046464822 @default.
- W2897623920 hasAuthorship W2897623920A5046706945 @default.
- W2897623920 hasAuthorship W2897623920A5067372077 @default.
- W2897623920 hasConcept C120665830 @default.
- W2897623920 hasConcept C121332964 @default.
- W2897623920 hasConcept C137905882 @default.
- W2897623920 hasConcept C171250308 @default.
- W2897623920 hasConcept C187590223 @default.
- W2897623920 hasConcept C192562407 @default.
- W2897623920 hasConcept C200274948 @default.
- W2897623920 hasConcept C204223013 @default.
- W2897623920 hasConcept C2777903624 @default.
- W2897623920 hasConcept C2778045333 @default.
- W2897623920 hasConcept C2779227376 @default.
- W2897623920 hasConcept C3020368824 @default.
- W2897623920 hasConcept C41008148 @default.
- W2897623920 hasConcept C49040817 @default.
- W2897623920 hasConcept C53524968 @default.
- W2897623920 hasConcept C7079719 @default.
- W2897623920 hasConceptScore W2897623920C120665830 @default.
- W2897623920 hasConceptScore W2897623920C121332964 @default.
- W2897623920 hasConceptScore W2897623920C137905882 @default.
- W2897623920 hasConceptScore W2897623920C171250308 @default.
- W2897623920 hasConceptScore W2897623920C187590223 @default.
- W2897623920 hasConceptScore W2897623920C192562407 @default.
- W2897623920 hasConceptScore W2897623920C200274948 @default.
- W2897623920 hasConceptScore W2897623920C204223013 @default.
- W2897623920 hasConceptScore W2897623920C2777903624 @default.
- W2897623920 hasConceptScore W2897623920C2778045333 @default.
- W2897623920 hasConceptScore W2897623920C2779227376 @default.
- W2897623920 hasConceptScore W2897623920C3020368824 @default.
- W2897623920 hasConceptScore W2897623920C41008148 @default.
- W2897623920 hasConceptScore W2897623920C49040817 @default.
- W2897623920 hasConceptScore W2897623920C53524968 @default.
- W2897623920 hasConceptScore W2897623920C7079719 @default.
- W2897623920 hasLocation W28976239201 @default.
- W2897623920 hasOpenAccess W2897623920 @default.
- W2897623920 hasPrimaryLocation W28976239201 @default.
- W2897623920 hasRelatedWork W1993082067 @default.
- W2897623920 hasRelatedWork W2006984262 @default.
- W2897623920 hasRelatedWork W200859554 @default.
- W2897623920 hasRelatedWork W2014071921 @default.
- W2897623920 hasRelatedWork W2024131527 @default.
- W2897623920 hasRelatedWork W2086960680 @default.
- W2897623920 hasRelatedWork W2089314237 @default.
- W2897623920 hasRelatedWork W2345971103 @default.
- W2897623920 hasRelatedWork W2897623920 @default.
- W2897623920 hasRelatedWork W3089471459 @default.
- W2897623920 isParatext "false" @default.
- W2897623920 isRetracted "false" @default.
- W2897623920 magId "2897623920" @default.
- W2897623920 workType "article" @default.