Matches in SemOpenAlex for { <https://semopenalex.org/work/W2897699268> ?p ?o ?g. }
Showing items 1 to 79 of
79
with 100 items per page.
- W2897699268 abstract "EUV lithography requires, because of the wavelength of 13.5 nm, all reflective optics which can be realized by using multilayer Bragg reflectors for normal incidence. The research required to develop this class of optics is ongoing for several decades already but experienced an enormous boost from the extremely stringent requirements of EUV Lithography. In this presentation we will discuss the path from fundamental research on the deposition of layers of a few nm thickness only towards a fully developed process, matured to deposit optics for prototype lithography machines. Topics like multilayer deposition, smoothing of interfaces, thermal stability, interface engineering, multilayer induced stress, and lateral uniformity will be discussed and examples of multilayer coated optics that fulfil the extremely tight specifications of EUV lithography machines will be discussed. Yet, while the first EUV litho tools are being shipped to semiconductor manufacturers, research on multilayers for an even shorter wavelength of 6.x nm already takes place. This means other multilayer materials and, because of its increasing importance, even more focus on issues like smooth layer growth and prevention of intermixing." @default.
- W2897699268 created "2018-10-26" @default.
- W2897699268 creator A5013423421 @default.
- W2897699268 creator A5048887362 @default.
- W2897699268 creator A5084070534 @default.
- W2897699268 date "2011-01-01" @default.
- W2897699268 modified "2023-09-25" @default.
- W2897699268 title "Reflective multilayer coatings, an enabling component of Extreme Ultraviolet Lithography and beyond" @default.
- W2897699268 hasPublicationYear "2011" @default.
- W2897699268 type Work @default.
- W2897699268 sameAs 2897699268 @default.
- W2897699268 citedByCount "0" @default.
- W2897699268 crossrefType "journal-article" @default.
- W2897699268 hasAuthorship W2897699268A5013423421 @default.
- W2897699268 hasAuthorship W2897699268A5048887362 @default.
- W2897699268 hasAuthorship W2897699268A5084070534 @default.
- W2897699268 hasConcept C105487726 @default.
- W2897699268 hasConcept C120665830 @default.
- W2897699268 hasConcept C121332964 @default.
- W2897699268 hasConcept C146024833 @default.
- W2897699268 hasConcept C162996421 @default.
- W2897699268 hasConcept C163581340 @default.
- W2897699268 hasConcept C171250308 @default.
- W2897699268 hasConcept C177409738 @default.
- W2897699268 hasConcept C19067145 @default.
- W2897699268 hasConcept C192562407 @default.
- W2897699268 hasConcept C200274948 @default.
- W2897699268 hasConcept C204223013 @default.
- W2897699268 hasConcept C2779227376 @default.
- W2897699268 hasConcept C41008148 @default.
- W2897699268 hasConcept C49040817 @default.
- W2897699268 hasConcept C520434653 @default.
- W2897699268 hasConcept C53524968 @default.
- W2897699268 hasConcept C71597924 @default.
- W2897699268 hasConceptScore W2897699268C105487726 @default.
- W2897699268 hasConceptScore W2897699268C120665830 @default.
- W2897699268 hasConceptScore W2897699268C121332964 @default.
- W2897699268 hasConceptScore W2897699268C146024833 @default.
- W2897699268 hasConceptScore W2897699268C162996421 @default.
- W2897699268 hasConceptScore W2897699268C163581340 @default.
- W2897699268 hasConceptScore W2897699268C171250308 @default.
- W2897699268 hasConceptScore W2897699268C177409738 @default.
- W2897699268 hasConceptScore W2897699268C19067145 @default.
- W2897699268 hasConceptScore W2897699268C192562407 @default.
- W2897699268 hasConceptScore W2897699268C200274948 @default.
- W2897699268 hasConceptScore W2897699268C204223013 @default.
- W2897699268 hasConceptScore W2897699268C2779227376 @default.
- W2897699268 hasConceptScore W2897699268C41008148 @default.
- W2897699268 hasConceptScore W2897699268C49040817 @default.
- W2897699268 hasConceptScore W2897699268C520434653 @default.
- W2897699268 hasConceptScore W2897699268C53524968 @default.
- W2897699268 hasConceptScore W2897699268C71597924 @default.
- W2897699268 hasLocation W28976992681 @default.
- W2897699268 hasOpenAccess W2897699268 @default.
- W2897699268 hasPrimaryLocation W28976992681 @default.
- W2897699268 hasRelatedWork W139951267 @default.
- W2897699268 hasRelatedWork W1565246150 @default.
- W2897699268 hasRelatedWork W1981309715 @default.
- W2897699268 hasRelatedWork W2020306129 @default.
- W2897699268 hasRelatedWork W2041293246 @default.
- W2897699268 hasRelatedWork W2062729969 @default.
- W2897699268 hasRelatedWork W2066868810 @default.
- W2897699268 hasRelatedWork W2076158234 @default.
- W2897699268 hasRelatedWork W2089012246 @default.
- W2897699268 hasRelatedWork W2089941652 @default.
- W2897699268 hasRelatedWork W2143562547 @default.
- W2897699268 hasRelatedWork W2323157727 @default.
- W2897699268 hasRelatedWork W2328746449 @default.
- W2897699268 hasRelatedWork W2419505417 @default.
- W2897699268 hasRelatedWork W2565542902 @default.
- W2897699268 hasRelatedWork W2788274416 @default.
- W2897699268 hasRelatedWork W2790813161 @default.
- W2897699268 hasRelatedWork W2976425159 @default.
- W2897699268 hasRelatedWork W2087156488 @default.
- W2897699268 hasRelatedWork W3093466004 @default.
- W2897699268 isParatext "false" @default.
- W2897699268 isRetracted "false" @default.
- W2897699268 magId "2897699268" @default.
- W2897699268 workType "article" @default.