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- W2897722680 abstract "Via scaling at a given CNT synthesis process is evaluated in terms of resistance variation among vias. As the underlying source of resistance variation, the relation between CNT diameter distribution and the catalyst thickness is characterized. CNT resistance model is used to predict via resistance from CNT structures in a via. Catalyst thickness scaling scheme considering CNT diameter variation is proposed." @default.
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- W2897722680 date "2018-06-01" @default.
- W2897722680 modified "2023-09-27" @default.
- W2897722680 title "Impact of CNT Diameter Distribution on CNT filled Via Scaling" @default.
- W2897722680 doi "https://doi.org/10.1109/edssc.2018.8487148" @default.
- W2897722680 hasPublicationYear "2018" @default.
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