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- W2897726211 abstract "Laser-plasma x-ray sources have been evaluated for submicron x-ray lithography. Exposure machines based on available, repetitively pulsed lasers of reasonable cost appear to be attractive. These machines would make full wafer exposure levels in times consistent with present manufacturing requirements." @default.
- W2897726211 created "2018-10-26" @default.
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- W2897726211 date "1983-01-01" @default.
- W2897726211 modified "2023-09-26" @default.
- W2897726211 title "Laser-plasma x-ray source for x-ray lithography" @default.
- W2897726211 doi "https://doi.org/10.2351/1.5057484" @default.
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