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- W2897736164 abstract "Further progress in micro-technology depends on the ability to create features of micron and sub-micron dimension. Photo-lithography, ablation, photo-polymerization are the processes, which are hard to imagine without an use of lasers. For micromachining of transparent and other material two diverse techniques are applied: deep-UV nanosecond and infrared ultrafast (femtosecond) pulse lasers. Excimer lasers are good sources of UV light, but require mask projection for processing. Usage of hazardous gases and a short maintenance period are their disadvantages. Ablation with femtosecond (fs) pulses takes place almost without thermal influence, but fs-lasers with a chirped pulse amplification system are complicated equipment for industrial applications. That is the reason, why their usage is limited to scientific laboratories.Further progress in micro-technology depends on the ability to create features of micron and sub-micron dimension. Photo-lithography, ablation, photo-polymerization are the processes, which are hard to imagine without an use of lasers. For micromachining of transparent and other material two diverse techniques are applied: deep-UV nanosecond and infrared ultrafast (femtosecond) pulse lasers. Excimer lasers are good sources of UV light, but require mask projection for processing. Usage of hazardous gases and a short maintenance period are their disadvantages. Ablation with femtosecond (fs) pulses takes place almost without thermal influence, but fs-lasers with a chirped pulse amplification system are complicated equipment for industrial applications. That is the reason, why their usage is limited to scientific laboratories." @default.
- W2897736164 created "2018-10-26" @default.
- W2897736164 creator A5058504175 @default.
- W2897736164 creator A5067367083 @default.
- W2897736164 date "2002-01-01" @default.
- W2897736164 modified "2023-09-27" @default.
- W2897736164 title "UV (ultraviolet) ps (picosecond)-laser with high peak power for micromachining" @default.
- W2897736164 doi "https://doi.org/10.2351/1.5065610" @default.
- W2897736164 hasPublicationYear "2002" @default.
- W2897736164 type Work @default.
- W2897736164 sameAs 2897736164 @default.
- W2897736164 citedByCount "3" @default.
- W2897736164 countsByYear W28977361642014 @default.
- W2897736164 crossrefType "proceedings-article" @default.
- W2897736164 hasAuthorship W2897736164A5058504175 @default.
- W2897736164 hasAuthorship W2897736164A5067367083 @default.
- W2897736164 hasConcept C120665830 @default.
- W2897736164 hasConcept C121332964 @default.
- W2897736164 hasConcept C136525101 @default.
- W2897736164 hasConcept C142724271 @default.
- W2897736164 hasConcept C145667562 @default.
- W2897736164 hasConcept C167735695 @default.
- W2897736164 hasConcept C178596936 @default.
- W2897736164 hasConcept C192562407 @default.
- W2897736164 hasConcept C204787440 @default.
- W2897736164 hasConcept C49040817 @default.
- W2897736164 hasConcept C51141536 @default.
- W2897736164 hasConcept C520434653 @default.
- W2897736164 hasConcept C55005982 @default.
- W2897736164 hasConcept C71924100 @default.
- W2897736164 hasConceptScore W2897736164C120665830 @default.
- W2897736164 hasConceptScore W2897736164C121332964 @default.
- W2897736164 hasConceptScore W2897736164C136525101 @default.
- W2897736164 hasConceptScore W2897736164C142724271 @default.
- W2897736164 hasConceptScore W2897736164C145667562 @default.
- W2897736164 hasConceptScore W2897736164C167735695 @default.
- W2897736164 hasConceptScore W2897736164C178596936 @default.
- W2897736164 hasConceptScore W2897736164C192562407 @default.
- W2897736164 hasConceptScore W2897736164C204787440 @default.
- W2897736164 hasConceptScore W2897736164C49040817 @default.
- W2897736164 hasConceptScore W2897736164C51141536 @default.
- W2897736164 hasConceptScore W2897736164C520434653 @default.
- W2897736164 hasConceptScore W2897736164C55005982 @default.
- W2897736164 hasConceptScore W2897736164C71924100 @default.
- W2897736164 hasLocation W28977361641 @default.
- W2897736164 hasOpenAccess W2897736164 @default.
- W2897736164 hasPrimaryLocation W28977361641 @default.
- W2897736164 hasRelatedWork W165758273 @default.
- W2897736164 hasRelatedWork W1669038869 @default.
- W2897736164 hasRelatedWork W1987827178 @default.
- W2897736164 hasRelatedWork W1991086666 @default.
- W2897736164 hasRelatedWork W1991644194 @default.
- W2897736164 hasRelatedWork W2051805448 @default.
- W2897736164 hasRelatedWork W2080378048 @default.
- W2897736164 hasRelatedWork W2086838105 @default.
- W2897736164 hasRelatedWork W2089116508 @default.
- W2897736164 hasRelatedWork W2097659668 @default.
- W2897736164 hasRelatedWork W2142168575 @default.
- W2897736164 hasRelatedWork W2249245259 @default.
- W2897736164 hasRelatedWork W232532820 @default.
- W2897736164 hasRelatedWork W2380858524 @default.
- W2897736164 hasRelatedWork W2468579779 @default.
- W2897736164 hasRelatedWork W3023963618 @default.
- W2897736164 hasRelatedWork W3112204263 @default.
- W2897736164 hasRelatedWork W3189004489 @default.
- W2897736164 hasRelatedWork W3197497831 @default.
- W2897736164 hasRelatedWork W842149631 @default.
- W2897736164 isParatext "false" @default.
- W2897736164 isRetracted "false" @default.
- W2897736164 magId "2897736164" @default.
- W2897736164 workType "article" @default.