Matches in SemOpenAlex for { <https://semopenalex.org/work/W2897748766> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2897748766 abstract "This paper describes both the velocity distribution of laser-ablated tantalum atoms in a plume and the plume temperature in order to discuss the behavior of particles inpulsed laser deposition (PLD). Optical time-of-flight (TOF) was used for the analysis. The velocity distributions of tantalum atoms ablated at the laser fluence in a range of 4-20J/cm2 agreed well with the Maxwell-Boltzmann distribution with center-of-mass velocity. This agreement enabled us to estimate the atom density distribution in the plume.Based on the analysis of atom density distribution in the plume, a simple particle filter for PLD using a pair of thin plates with parallel slits was designed to reduce the number of large particles, such as splashed liquid, which often deposit on the film surface causing to deterioration in film properties; i.e., in transparency, uniformity and corrosion resistance.With the particle filter, tantalum films with a smooth and particle-free surface were obtained in a vacuum over a range of 10−3-10Pa.This paper describes both the velocity distribution of laser-ablated tantalum atoms in a plume and the plume temperature in order to discuss the behavior of particles inpulsed laser deposition (PLD). Optical time-of-flight (TOF) was used for the analysis. The velocity distributions of tantalum atoms ablated at the laser fluence in a range of 4-20J/cm2 agreed well with the Maxwell-Boltzmann distribution with center-of-mass velocity. This agreement enabled us to estimate the atom density distribution in the plume.Based on the analysis of atom density distribution in the plume, a simple particle filter for PLD using a pair of thin plates with parallel slits was designed to reduce the number of large particles, such as splashed liquid, which often deposit on the film surface causing to deterioration in film properties; i.e., in transparency, uniformity and corrosion resistance.With the particle filter, tantalum films with a smooth and particle-free surface were obtained in a vacuum over a range of 10−3-10Pa." @default.
- W2897748766 created "2018-10-26" @default.
- W2897748766 creator A5003225815 @default.
- W2897748766 creator A5051240668 @default.
- W2897748766 creator A5074113195 @default.
- W2897748766 creator A5088966713 @default.
- W2897748766 date "1998-01-01" @default.
- W2897748766 modified "2023-09-27" @default.
- W2897748766 title "A particle filtering method for pulsed laser deposition" @default.
- W2897748766 doi "https://doi.org/10.2351/1.5059112" @default.
- W2897748766 hasPublicationYear "1998" @default.
- W2897748766 type Work @default.
- W2897748766 sameAs 2897748766 @default.
- W2897748766 citedByCount "0" @default.
- W2897748766 crossrefType "proceedings-article" @default.
- W2897748766 hasAuthorship W2897748766A5003225815 @default.
- W2897748766 hasAuthorship W2897748766A5051240668 @default.
- W2897748766 hasAuthorship W2897748766A5074113195 @default.
- W2897748766 hasAuthorship W2897748766A5088966713 @default.
- W2897748766 hasConcept C111368507 @default.
- W2897748766 hasConcept C113196181 @default.
- W2897748766 hasConcept C120665830 @default.
- W2897748766 hasConcept C121332964 @default.
- W2897748766 hasConcept C127313418 @default.
- W2897748766 hasConcept C149635348 @default.
- W2897748766 hasConcept C151730666 @default.
- W2897748766 hasConcept C171250308 @default.
- W2897748766 hasConcept C184779094 @default.
- W2897748766 hasConcept C185592680 @default.
- W2897748766 hasConcept C19067145 @default.
- W2897748766 hasConcept C191897082 @default.
- W2897748766 hasConcept C192562407 @default.
- W2897748766 hasConcept C22078206 @default.
- W2897748766 hasConcept C2775840915 @default.
- W2897748766 hasConcept C2778517922 @default.
- W2897748766 hasConcept C2816523 @default.
- W2897748766 hasConcept C37982897 @default.
- W2897748766 hasConcept C41008148 @default.
- W2897748766 hasConcept C41999313 @default.
- W2897748766 hasConcept C43617362 @default.
- W2897748766 hasConcept C514619126 @default.
- W2897748766 hasConcept C520434653 @default.
- W2897748766 hasConcept C58312451 @default.
- W2897748766 hasConcept C64297162 @default.
- W2897748766 hasConcept C86803240 @default.
- W2897748766 hasConcept C97355855 @default.
- W2897748766 hasConceptScore W2897748766C111368507 @default.
- W2897748766 hasConceptScore W2897748766C113196181 @default.
- W2897748766 hasConceptScore W2897748766C120665830 @default.
- W2897748766 hasConceptScore W2897748766C121332964 @default.
- W2897748766 hasConceptScore W2897748766C127313418 @default.
- W2897748766 hasConceptScore W2897748766C149635348 @default.
- W2897748766 hasConceptScore W2897748766C151730666 @default.
- W2897748766 hasConceptScore W2897748766C171250308 @default.
- W2897748766 hasConceptScore W2897748766C184779094 @default.
- W2897748766 hasConceptScore W2897748766C185592680 @default.
- W2897748766 hasConceptScore W2897748766C19067145 @default.
- W2897748766 hasConceptScore W2897748766C191897082 @default.
- W2897748766 hasConceptScore W2897748766C192562407 @default.
- W2897748766 hasConceptScore W2897748766C22078206 @default.
- W2897748766 hasConceptScore W2897748766C2775840915 @default.
- W2897748766 hasConceptScore W2897748766C2778517922 @default.
- W2897748766 hasConceptScore W2897748766C2816523 @default.
- W2897748766 hasConceptScore W2897748766C37982897 @default.
- W2897748766 hasConceptScore W2897748766C41008148 @default.
- W2897748766 hasConceptScore W2897748766C41999313 @default.
- W2897748766 hasConceptScore W2897748766C43617362 @default.
- W2897748766 hasConceptScore W2897748766C514619126 @default.
- W2897748766 hasConceptScore W2897748766C520434653 @default.
- W2897748766 hasConceptScore W2897748766C58312451 @default.
- W2897748766 hasConceptScore W2897748766C64297162 @default.
- W2897748766 hasConceptScore W2897748766C86803240 @default.
- W2897748766 hasConceptScore W2897748766C97355855 @default.
- W2897748766 hasLocation W28977487661 @default.
- W2897748766 hasOpenAccess W2897748766 @default.
- W2897748766 hasPrimaryLocation W28977487661 @default.
- W2897748766 hasRelatedWork W1777981321 @default.
- W2897748766 hasRelatedWork W1989129443 @default.
- W2897748766 hasRelatedWork W1994250990 @default.
- W2897748766 hasRelatedWork W2004381013 @default.
- W2897748766 hasRelatedWork W2018854124 @default.
- W2897748766 hasRelatedWork W2029452495 @default.
- W2897748766 hasRelatedWork W2030011745 @default.
- W2897748766 hasRelatedWork W2035010557 @default.
- W2897748766 hasRelatedWork W2045829396 @default.
- W2897748766 hasRelatedWork W2060674105 @default.
- W2897748766 hasRelatedWork W2062846010 @default.
- W2897748766 hasRelatedWork W2066857514 @default.
- W2897748766 hasRelatedWork W2075437725 @default.
- W2897748766 hasRelatedWork W2095396686 @default.
- W2897748766 hasRelatedWork W2110426168 @default.
- W2897748766 hasRelatedWork W2319585748 @default.
- W2897748766 hasRelatedWork W2379691069 @default.
- W2897748766 hasRelatedWork W2538584270 @default.
- W2897748766 hasRelatedWork W2973472971 @default.
- W2897748766 hasRelatedWork W2093673120 @default.
- W2897748766 isParatext "false" @default.
- W2897748766 isRetracted "false" @default.
- W2897748766 magId "2897748766" @default.
- W2897748766 workType "article" @default.