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• W2897787198 abstract "The Laser Microjet© is a world-wide patented technology which uses ns-laser pulses which is guided to the work piece in a water jet. The sample is therefore cooled by the water and thermal damage during cutting is reduced which is relevant for metals and semiconductor materials. For the case of sapphire cutting this leads to lower thermal load of the samples and therefore no cracking during cutting. Sapphire cutting was until now not possible with the Laser Microjet© although it is used for micro machining of a lot of other materials like semiconductors, metals, diamond and ceramics. Cutting up to 3 mm thick sapphire with parallel walls with a roughness of 5 mm as well as further improve the backside edge quality in the future.The Laser Microjet© is a world-wide patented technology which uses ns-laser pulses which is guided to the work piece in a water jet. The sample is therefore cooled by the water and thermal damage during cutting is reduced which is relevant for metals and semiconductor materials. For the case of sapphire cutting this leads to lower thermal load of the samples and therefore no cracking during cutting. Sapphire cutting was until now not possible with the Laser Microjet© although it is used for micro machining of a lot of other materials like semiconductors, metals, diamond and ceramics. Cutting up to 3 mm thick sapphire with parallel walls with a roughness of < 0.5 µm and a kerf width of < 100 µm is achieved. The cutting speed of up to 0.1 mm/s for 1 mm samples has been achieved. The cut samples exhibit parallel walls which is a big advantage of the Laser Microjet© technology compared to other laser cutting technologies, not only for sapphire. The edges at the front side exhibit high quality with a radius of..." @default.
• W2897787198 created "2018-10-26" @default.
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• W2897787198 date "2014-01-01" @default.
• W2897787198 modified "2023-09-25" @default.
• W2897787198 title "Laser microjet© cutting of up to 3 mm thick sapphire" @default.
• W2897787198 doi "https://doi.org/10.2351/1.5063039" @default.
• W2897787198 hasPublicationYear "2014" @default.
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