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- W2897795780 endingPage "120" @default.
- W2897795780 startingPage "113" @default.
- W2897795780 abstract "Thin film piezoelectric-on-silicon (TPoS) elliptical resonators are presented in this paper. The micro-resonators are composed of two rectangular resonant plates vibrating out-of-phase at the first length-extensional mode, which are coupled through arches on sides. In this way, extensional motions of rectangles are converted to rotational motions via arches which make the resonator suitable for operation under water, where all sidewalls of the resonator vibrate in parallel with liquid to maintain high liquid phase quality factors ( ${Q}$ ). Thanks to wide electrode area available on rectangular plates, strong piezoelectric transduction is achieved leading to low liquid phase motional resistances. Different variations of the resonators were designed and fabricated to operate at different resonance frequencies. The TPoS elliptical resonators exhibit high ${Q}text{s}$ up to 7400 for operation in air while showing liquid phase ${Q}text{s}$ as high as 200. An elliptical resonator operating at 4 MHz with the lowest motional resistance of 5.6 $text{k}Omega $ was involved in an oscillation circuit with a single-stage sustaining amplifier exhibiting frequency stability of $2times 10^{-7}$ ( $Delta f/f_{0}$ ). Such high stability makes such resonators an excellent choice for high-resolution mass or viscosity sensing at liquid phase such as biosensing applications." @default.
- W2897795780 created "2018-10-26" @default.
- W2897795780 creator A5020427723 @default.
- W2897795780 creator A5022358493 @default.
- W2897795780 creator A5045947298 @default.
- W2897795780 date "2019-01-01" @default.
- W2897795780 modified "2023-10-14" @default.
- W2897795780 title "Thin Film Piezoelectric-on-Silicon Elliptical Resonators With Low Liquid Phase Motional Resistances" @default.
- W2897795780 cites W1978597639 @default.
- W2897795780 cites W1990726623 @default.
- W2897795780 cites W1995542132 @default.
- W2897795780 cites W1999035242 @default.
- W2897795780 cites W2037503669 @default.
- W2897795780 cites W2046467719 @default.
- W2897795780 cites W2086420132 @default.
- W2897795780 cites W2115927041 @default.
- W2897795780 cites W2127916453 @default.
- W2897795780 cites W2142622137 @default.
- W2897795780 cites W2149467462 @default.
- W2897795780 cites W2159012223 @default.
- W2897795780 cites W2165000018 @default.
- W2897795780 cites W2168369249 @default.
- W2897795780 cites W2171927492 @default.
- W2897795780 cites W2519887989 @default.
- W2897795780 cites W2791881845 @default.
- W2897795780 doi "https://doi.org/10.1109/jsen.2018.2875054" @default.
- W2897795780 hasPublicationYear "2019" @default.
- W2897795780 type Work @default.
- W2897795780 sameAs 2897795780 @default.
- W2897795780 citedByCount "9" @default.
- W2897795780 countsByYear W28977957802019 @default.
- W2897795780 countsByYear W28977957802020 @default.
- W2897795780 countsByYear W28977957802021 @default.
- W2897795780 countsByYear W28977957802022 @default.
- W2897795780 countsByYear W28977957802023 @default.
- W2897795780 crossrefType "journal-article" @default.
- W2897795780 hasAuthorship W2897795780A5020427723 @default.
- W2897795780 hasAuthorship W2897795780A5022358493 @default.
- W2897795780 hasAuthorship W2897795780A5045947298 @default.
- W2897795780 hasBestOaLocation W28977957801 @default.
- W2897795780 hasConcept C100082104 @default.
- W2897795780 hasConcept C121332964 @default.
- W2897795780 hasConcept C159985019 @default.
- W2897795780 hasConcept C171250308 @default.
- W2897795780 hasConcept C19067145 @default.
- W2897795780 hasConcept C192562407 @default.
- W2897795780 hasConcept C44280652 @default.
- W2897795780 hasConcept C49040817 @default.
- W2897795780 hasConcept C544956773 @default.
- W2897795780 hasConcept C62520636 @default.
- W2897795780 hasConcept C97126364 @default.
- W2897795780 hasConceptScore W2897795780C100082104 @default.
- W2897795780 hasConceptScore W2897795780C121332964 @default.
- W2897795780 hasConceptScore W2897795780C159985019 @default.
- W2897795780 hasConceptScore W2897795780C171250308 @default.
- W2897795780 hasConceptScore W2897795780C19067145 @default.
- W2897795780 hasConceptScore W2897795780C192562407 @default.
- W2897795780 hasConceptScore W2897795780C44280652 @default.
- W2897795780 hasConceptScore W2897795780C49040817 @default.
- W2897795780 hasConceptScore W2897795780C544956773 @default.
- W2897795780 hasConceptScore W2897795780C62520636 @default.
- W2897795780 hasConceptScore W2897795780C97126364 @default.
- W2897795780 hasFunder F4320306076 @default.
- W2897795780 hasIssue "1" @default.
- W2897795780 hasLocation W28977957801 @default.
- W2897795780 hasOpenAccess W2897795780 @default.
- W2897795780 hasPrimaryLocation W28977957801 @default.
- W2897795780 hasRelatedWork W1990086497 @default.
- W2897795780 hasRelatedWork W2028132284 @default.
- W2897795780 hasRelatedWork W2038654642 @default.
- W2897795780 hasRelatedWork W2066382428 @default.
- W2897795780 hasRelatedWork W2132352029 @default.
- W2897795780 hasRelatedWork W2159445002 @default.
- W2897795780 hasRelatedWork W2359476263 @default.
- W2897795780 hasRelatedWork W2374308001 @default.
- W2897795780 hasRelatedWork W2379633532 @default.
- W2897795780 hasRelatedWork W4220653834 @default.
- W2897795780 hasVolume "19" @default.
- W2897795780 isParatext "false" @default.
- W2897795780 isRetracted "false" @default.
- W2897795780 magId "2897795780" @default.
- W2897795780 workType "article" @default.