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• W2897811498 abstract "We report on a new approach for a substantial performance increase in large-scale micro machining using picosecond lasers by combination of Diffractive Optical Elements (DOEs) for beam splitting with conventional scanner technology. We also demonstrate practical multiplication of conventional single-spot machining of low ablation depth rates at 25 nm/pulse. This new approach is based upon the fabrication of Riblet surfaces on compressor blades as one exemplary application scenario for high precision laser patterning of micro structures. Single-spot area throughputs are increased by the factor of 7 when applying multi-spot ablation with a 1 x 7 array. Limitations for using DOEs such as thermal interaction of adjoining spots and process-related heating of the work piece are discussed and described via a numeric boundary consideration. Moreover, applicable process windows for efficient parallel micro machining are identified. We conclude with an estimation of maximum achievable throughput values, based on the power reserve of current picosecond lasers combined with available DOEs with up to 225 spots.We report on a new approach for a substantial performance increase in large-scale micro machining using picosecond lasers by combination of Diffractive Optical Elements (DOEs) for beam splitting with conventional scanner technology. We also demonstrate practical multiplication of conventional single-spot machining of low ablation depth rates at 25 nm/pulse. This new approach is based upon the fabrication of Riblet surfaces on compressor blades as one exemplary application scenario for high precision laser patterning of micro structures. Single-spot area throughputs are increased by the factor of 7 when applying multi-spot ablation with a 1 x 7 array. Limitations for using DOEs such as thermal interaction of adjoining spots and process-related heating of the work piece are discussed and described via a numeric boundary consideration. Moreover, applicable process windows for efficient parallel micro machining are identified. We conclude with an estimation of maximum achievable throughput values, based on th..." @default.
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• W2897811498 date "2010-01-01" @default.
• W2897811498 modified "2023-09-25" @default.
• W2897811498 title "Large-scale Riblet surfaces using multi-spot micro machining" @default.
• W2897811498 doi "https://doi.org/10.2351/1.5062111" @default.
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