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• W2897828218 endingPage "46" @default.
• W2897828218 startingPage "38" @default.
• W2897828218 abstract "The various crystallographic orientations in semiconductors as ZnO exhibit different resistivity under the ion beam irradiation/implantation. Study of the various crystallographic orientations is mandatory for nano-structured semiconductor system development. This paper reports on the implantation damage build-up, structural modification and Er dopant position in a-plane and m-plane ZnO implanted with Er+ 400 keV ions at the ion fluences 5 × 1014, 2.5 × 1015, 5 × 1015 cm−2 and subsequently annealed at 600 °C in O2 atmosphere using Rutherford Back-Scattering spectrometry (RBS) in channelling mode as well as using Raman spectroscopy. Strongly suppressed surface damage formation was observed in both crystallographic orientations compared to the deep damage growth with the increased ion implantation fluence. More progressive damage accumulation appeared in m-plane ZnO compared to a-plane ZnO. Simultaneously, the strong Er out-diffusion depth profile in m-plane ZnO accompanied by the damage accumulation at the surface was observed after the annealing. Contrary, the surface recovery accompanied by Er concentration depth profiles keeping a normal distribution with a small maximum shift to the surface was observed in a-plane ZnO. Different structure recovery and Er behaviour was evidenced in a-plane and m-plane ZnO by RBS-C, moreover Raman spectroscopy proved a lower damage at higher ion fluences introduced in a-plane ZnO compared to m-plane. The structure modifications were discussed in connection with a damage accumulation and Er concentration depth profile shape in various ZnO crystallographic orientations in as-implanted and as-annealed samples." @default.
• W2897828218 created "2018-10-26" @default.
• W2897828218 creator A5012903614 @default.
• W2897828218 creator A5016865798 @default.
• W2897828218 creator A5022543731 @default.
• W2897828218 creator A5052187531 @default.
• W2897828218 creator A5058994147 @default.
• W2897828218 creator A5066819212 @default.
• W2897828218 creator A5082791243 @default.
• W2897828218 creator A5087515581 @default.
• W2897828218 date "2019-12-01" @default.
• W2897828218 modified "2023-10-16" @default.
• W2897828218 title "Damage formation and Er structural incorporation in m-plane and a-plane ZnO" @default.
• W2897828218 cites W1962044485 @default.
• W2897828218 cites W1964482686 @default.
• W2897828218 cites W1965435598 @default.
• W2897828218 cites W1971228092 @default.
• W2897828218 cites W1994823919 @default.
• W2897828218 cites W1998437016 @default.
• W2897828218 cites W2000443039 @default.
• W2897828218 cites W2001654211 @default.
• W2897828218 cites W2020143503 @default.
• W2897828218 cites W2030124709 @default.
• W2897828218 cites W2052753424 @default.
• W2897828218 cites W2058537512 @default.
• W2897828218 cites W2068499362 @default.
• W2897828218 cites W2159175131 @default.
• W2897828218 cites W2325722648 @default.
• W2897828218 cites W2536848829 @default.
• W2897828218 cites W2620600345 @default.
• W2897828218 cites W2736019563 @default.
• W2897828218 cites W2753675576 @default.
• W2897828218 doi "https://doi.org/10.1016/j.nimb.2018.10.003" @default.
• W2897828218 hasPublicationYear "2019" @default.
• W2897828218 type Work @default.
• W2897828218 sameAs 2897828218 @default.
• W2897828218 citedByCount "4" @default.
• W2897828218 countsByYear W28978282182019 @default.
• W2897828218 countsByYear W28978282182020 @default.
• W2897828218 countsByYear W28978282182021 @default.
• W2897828218 crossrefType "journal-article" @default.
• W2897828218 hasAuthorship W2897828218A5012903614 @default.
• W2897828218 hasAuthorship W2897828218A5016865798 @default.
• W2897828218 hasAuthorship W2897828218A5022543731 @default.
• W2897828218 hasAuthorship W2897828218A5052187531 @default.
• W2897828218 hasAuthorship W2897828218A5058994147 @default.
• W2897828218 hasAuthorship W2897828218A5066819212 @default.
• W2897828218 hasAuthorship W2897828218A5082791243 @default.
• W2897828218 hasAuthorship W2897828218A5087515581 @default.
• W2897828218 hasConcept C113196181 @default.
• W2897828218 hasConcept C120665830 @default.
• W2897828218 hasConcept C121332964 @default.
• W2897828218 hasConcept C145148216 @default.
• W2897828218 hasConcept C159985019 @default.
• W2897828218 hasConcept C171250308 @default.
• W2897828218 hasConcept C178790620 @default.
• W2897828218 hasConcept C185592680 @default.
• W2897828218 hasConcept C19067145 @default.
• W2897828218 hasConcept C191952053 @default.
• W2897828218 hasConcept C192562407 @default.
• W2897828218 hasConcept C22078206 @default.
• W2897828218 hasConcept C2777855556 @default.
• W2897828218 hasConcept C2780547777 @default.
• W2897828218 hasConcept C2781028716 @default.
• W2897828218 hasConcept C40003534 @default.
• W2897828218 hasConcept C41823505 @default.
• W2897828218 hasConcept C43617362 @default.
• W2897828218 hasConcept C49040817 @default.
• W2897828218 hasConcept C57863236 @default.
• W2897828218 hasConcept C8010536 @default.
• W2897828218 hasConceptScore W2897828218C113196181 @default.
• W2897828218 hasConceptScore W2897828218C120665830 @default.
• W2897828218 hasConceptScore W2897828218C121332964 @default.
• W2897828218 hasConceptScore W2897828218C145148216 @default.
• W2897828218 hasConceptScore W2897828218C159985019 @default.
• W2897828218 hasConceptScore W2897828218C171250308 @default.
• W2897828218 hasConceptScore W2897828218C178790620 @default.
• W2897828218 hasConceptScore W2897828218C185592680 @default.
• W2897828218 hasConceptScore W2897828218C19067145 @default.
• W2897828218 hasConceptScore W2897828218C191952053 @default.
• W2897828218 hasConceptScore W2897828218C192562407 @default.
• W2897828218 hasConceptScore W2897828218C22078206 @default.
• W2897828218 hasConceptScore W2897828218C2777855556 @default.
• W2897828218 hasConceptScore W2897828218C2780547777 @default.
• W2897828218 hasConceptScore W2897828218C2781028716 @default.
• W2897828218 hasConceptScore W2897828218C40003534 @default.
• W2897828218 hasConceptScore W2897828218C41823505 @default.
• W2897828218 hasConceptScore W2897828218C43617362 @default.
• W2897828218 hasConceptScore W2897828218C49040817 @default.
• W2897828218 hasConceptScore W2897828218C57863236 @default.
• W2897828218 hasConceptScore W2897828218C8010536 @default.
• W2897828218 hasFunder F4320321006 @default.
• W2897828218 hasLocation W28978282181 @default.
• W2897828218 hasOpenAccess W2897828218 @default.
• W2897828218 hasPrimaryLocation W28978282181 @default.
• W2897828218 hasRelatedWork W1982776373 @default.
• W2897828218 hasRelatedWork W1984315097 @default.
• W2897828218 hasRelatedWork W1985873695 @default.

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