Matches in SemOpenAlex for { <https://semopenalex.org/work/W2897964697> ?p ?o ?g. }
- W2897964697 endingPage "466" @default.
- W2897964697 startingPage "462" @default.
- W2897964697 abstract "Abstract In order to improve the hygroscopic property of LaON and also maintain its excellent interface quality with Ge, LaON incorporated with Ta is proposed and its hygroscopic and electrical properties are investigated by using dry and wet annealing. It is found that large improvement in hygroscopic property can be obtained by the Ta incorporation, and also the LaTaON film exhibits excellent interface quality with the Ge substrate due to the capability of TaON in blocking elemental inter-diffusions and also the passivation effect of LaGeOxNy formed at the LaTaON/Ge interface. Therefore, LaTaON can be considered as a high-quality gate dielectric in Ge MOS device to achieve excellent interfacial and electrical properties, e.g. in this work: high k value (21.0), low interface-state density (5.94 × 1011 cm−2 eV−1), low gate leakage current (3.07 × 10−4 A/cm2 at Vg = Vfb + 1 V) and high resistance against moisture absorption." @default.
- W2897964697 created "2018-10-26" @default.
- W2897964697 creator A5017344729 @default.
- W2897964697 creator A5025351615 @default.
- W2897964697 creator A5037843394 @default.
- W2897964697 creator A5044914665 @default.
- W2897964697 creator A5049264813 @default.
- W2897964697 creator A5055654596 @default.
- W2897964697 date "2019-02-01" @default.
- W2897964697 modified "2023-10-17" @default.
- W2897964697 title "Moisture-absorption-free LaTaON as gate dielectric of Ge MOS devices" @default.
- W2897964697 cites W1496595606 @default.
- W2897964697 cites W1569656437 @default.
- W2897964697 cites W1610267559 @default.
- W2897964697 cites W1965958956 @default.
- W2897964697 cites W1969261628 @default.
- W2897964697 cites W1978822844 @default.
- W2897964697 cites W1984167409 @default.
- W2897964697 cites W1984369159 @default.
- W2897964697 cites W1987944490 @default.
- W2897964697 cites W1990145467 @default.
- W2897964697 cites W1990713771 @default.
- W2897964697 cites W1994840306 @default.
- W2897964697 cites W2026915199 @default.
- W2897964697 cites W2027329930 @default.
- W2897964697 cites W2029590794 @default.
- W2897964697 cites W2030264448 @default.
- W2897964697 cites W2032203591 @default.
- W2897964697 cites W2035122257 @default.
- W2897964697 cites W2038034540 @default.
- W2897964697 cites W2038458143 @default.
- W2897964697 cites W2041307348 @default.
- W2897964697 cites W2043348419 @default.
- W2897964697 cites W2047322488 @default.
- W2897964697 cites W2065678896 @default.
- W2897964697 cites W2066130678 @default.
- W2897964697 cites W2072123065 @default.
- W2897964697 cites W2082152697 @default.
- W2897964697 cites W2086421729 @default.
- W2897964697 cites W2112470407 @default.
- W2897964697 cites W2114765141 @default.
- W2897964697 cites W2122875263 @default.
- W2897964697 cites W2128412452 @default.
- W2897964697 cites W2158361930 @default.
- W2897964697 cites W2322862231 @default.
- W2897964697 cites W2329050813 @default.
- W2897964697 cites W2335695570 @default.
- W2897964697 cites W2336241111 @default.
- W2897964697 cites W2477025029 @default.
- W2897964697 cites W2545692258 @default.
- W2897964697 doi "https://doi.org/10.1016/j.apsusc.2018.10.158" @default.
- W2897964697 hasPublicationYear "2019" @default.
- W2897964697 type Work @default.
- W2897964697 sameAs 2897964697 @default.
- W2897964697 citedByCount "3" @default.
- W2897964697 countsByYear W28979646972021 @default.
- W2897964697 countsByYear W28979646972023 @default.
- W2897964697 crossrefType "journal-article" @default.
- W2897964697 hasAuthorship W2897964697A5017344729 @default.
- W2897964697 hasAuthorship W2897964697A5025351615 @default.
- W2897964697 hasAuthorship W2897964697A5037843394 @default.
- W2897964697 hasAuthorship W2897964697A5044914665 @default.
- W2897964697 hasAuthorship W2897964697A5049264813 @default.
- W2897964697 hasAuthorship W2897964697A5055654596 @default.
- W2897964697 hasConcept C119599485 @default.
- W2897964697 hasConcept C121332964 @default.
- W2897964697 hasConcept C125287762 @default.
- W2897964697 hasConcept C127413603 @default.
- W2897964697 hasConcept C133386390 @default.
- W2897964697 hasConcept C159985019 @default.
- W2897964697 hasConcept C165801399 @default.
- W2897964697 hasConcept C166972891 @default.
- W2897964697 hasConcept C172385210 @default.
- W2897964697 hasConcept C176864760 @default.
- W2897964697 hasConcept C192562407 @default.
- W2897964697 hasConcept C49040817 @default.
- W2897964697 hasConcept C544956773 @default.
- W2897964697 hasConcept C550623735 @default.
- W2897964697 hasConcept C61696701 @default.
- W2897964697 hasConceptScore W2897964697C119599485 @default.
- W2897964697 hasConceptScore W2897964697C121332964 @default.
- W2897964697 hasConceptScore W2897964697C125287762 @default.
- W2897964697 hasConceptScore W2897964697C127413603 @default.
- W2897964697 hasConceptScore W2897964697C133386390 @default.
- W2897964697 hasConceptScore W2897964697C159985019 @default.
- W2897964697 hasConceptScore W2897964697C165801399 @default.
- W2897964697 hasConceptScore W2897964697C166972891 @default.
- W2897964697 hasConceptScore W2897964697C172385210 @default.
- W2897964697 hasConceptScore W2897964697C176864760 @default.
- W2897964697 hasConceptScore W2897964697C192562407 @default.
- W2897964697 hasConceptScore W2897964697C49040817 @default.
- W2897964697 hasConceptScore W2897964697C544956773 @default.
- W2897964697 hasConceptScore W2897964697C550623735 @default.
- W2897964697 hasConceptScore W2897964697C61696701 @default.
- W2897964697 hasFunder F4320321001 @default.
- W2897964697 hasFunder F4320322170 @default.
- W2897964697 hasFunder F4320322598 @default.
- W2897964697 hasLocation W28979646971 @default.