Matches in SemOpenAlex for { <https://semopenalex.org/work/W2897987514> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W2897987514 abstract "PECVD hydrogenated silicon oxynitride (SiON) thin film, due to its excellent chemical and physical properties, is widely used in flexible encapsulation as an protective layer. However, SiON thin film cracking severely restricted the performance of the thin film encapsulation, and cannot be effectively tackled by flexible electronics industry. So improving the quality of the SiON thin film and preventing thin film cracking is crucial to flexible electronics industry. In this paper, effects of RF power, pressure, process gas on stress property in SiON thin film were studied in detail by stress meter. Therefore, increasing RF power, pressure and decreasing H2 flow can prevent SiON thin film cracking." @default.
- W2897987514 created "2018-10-26" @default.
- W2897987514 creator A5003060345 @default.
- W2897987514 creator A5003642180 @default.
- W2897987514 creator A5010506819 @default.
- W2897987514 creator A5019672055 @default.
- W2897987514 creator A5041947757 @default.
- W2897987514 creator A5050664289 @default.
- W2897987514 creator A5067838779 @default.
- W2897987514 creator A5083667592 @default.
- W2897987514 creator A5086167499 @default.
- W2897987514 date "2018-08-01" @default.
- W2897987514 modified "2023-10-17" @default.
- W2897987514 title "Method to Prevent Thin Film Cracking of Thin Film Encapsulation in Flexible AMOLED" @default.
- W2897987514 cites W1969500546 @default.
- W2897987514 cites W2026574402 @default.
- W2897987514 cites W2027968231 @default.
- W2897987514 cites W2028090211 @default.
- W2897987514 cites W2084031075 @default.
- W2897987514 cites W2154337416 @default.
- W2897987514 doi "https://doi.org/10.1109/icept.2018.8480679" @default.
- W2897987514 hasPublicationYear "2018" @default.
- W2897987514 type Work @default.
- W2897987514 sameAs 2897987514 @default.
- W2897987514 citedByCount "0" @default.
- W2897987514 crossrefType "proceedings-article" @default.
- W2897987514 hasAuthorship W2897987514A5003060345 @default.
- W2897987514 hasAuthorship W2897987514A5003642180 @default.
- W2897987514 hasAuthorship W2897987514A5010506819 @default.
- W2897987514 hasAuthorship W2897987514A5019672055 @default.
- W2897987514 hasAuthorship W2897987514A5041947757 @default.
- W2897987514 hasAuthorship W2897987514A5050664289 @default.
- W2897987514 hasAuthorship W2897987514A5067838779 @default.
- W2897987514 hasAuthorship W2897987514A5083667592 @default.
- W2897987514 hasAuthorship W2897987514A5086167499 @default.
- W2897987514 hasConcept C101050124 @default.
- W2897987514 hasConcept C159985019 @default.
- W2897987514 hasConcept C171250308 @default.
- W2897987514 hasConcept C19067145 @default.
- W2897987514 hasConcept C192562407 @default.
- W2897987514 hasConcept C2779227376 @default.
- W2897987514 hasConcept C49040817 @default.
- W2897987514 hasConcept C58396970 @default.
- W2897987514 hasConcept C70201059 @default.
- W2897987514 hasConcept C87359718 @default.
- W2897987514 hasConceptScore W2897987514C101050124 @default.
- W2897987514 hasConceptScore W2897987514C159985019 @default.
- W2897987514 hasConceptScore W2897987514C171250308 @default.
- W2897987514 hasConceptScore W2897987514C19067145 @default.
- W2897987514 hasConceptScore W2897987514C192562407 @default.
- W2897987514 hasConceptScore W2897987514C2779227376 @default.
- W2897987514 hasConceptScore W2897987514C49040817 @default.
- W2897987514 hasConceptScore W2897987514C58396970 @default.
- W2897987514 hasConceptScore W2897987514C70201059 @default.
- W2897987514 hasConceptScore W2897987514C87359718 @default.
- W2897987514 hasLocation W28979875141 @default.
- W2897987514 hasOpenAccess W2897987514 @default.
- W2897987514 hasPrimaryLocation W28979875141 @default.
- W2897987514 hasRelatedWork W2123744266 @default.
- W2897987514 hasRelatedWork W2364316153 @default.
- W2897987514 hasRelatedWork W2380293314 @default.
- W2897987514 hasRelatedWork W2413323117 @default.
- W2897987514 hasRelatedWork W2522515270 @default.
- W2897987514 hasRelatedWork W2557651226 @default.
- W2897987514 hasRelatedWork W2897987514 @default.
- W2897987514 hasRelatedWork W2974623595 @default.
- W2897987514 hasRelatedWork W4234066668 @default.
- W2897987514 hasRelatedWork W4285802202 @default.
- W2897987514 isParatext "false" @default.
- W2897987514 isRetracted "false" @default.
- W2897987514 magId "2897987514" @default.
- W2897987514 workType "article" @default.