FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2898006934> ?p ?o ?g. }

• W2898006934 abstract "Novel insight into the mechanisms that govern nucleation during tungsten atomic layer deposition is presented through a detailed analysis using density functional theory. Using the calculated energetics, the authors suggest the most probable series of reactions that lead to monolayer formation on desired growth surfaces, Si(100) and W(110), during sequential doses of WF6 and SiH4. From this analysis, they conclude that a relatively high-energy barrier exists for initial nucleation of WF6 on a silicon substrate; therefore, the system is limited to physical adsorption and is only capable of accessing nucleation pathways once the reaction barrier is energetically accessible. During early doses of WF6, the initial silicon surface acts as the reductant. Results from this half-reaction provide support for the noncoalesced growth of initial W layers since nucleation is shown to require a 2:1 ratio of silicon to WF6. In addition, the release of H2 is significantly favored over HF production leading to the formation of fluorine-contaminated silicon sites; etching of these sites is heavily supported by the absence of fluorine observed in experimentally deposited films as well as the high volatility of silicon-subfluorides. In the second half-reaction, SiH4 plays the multipurpose role of stripping fluorine atoms from W, displacing any adsorbed hydrogen atoms, and depositing a silicon-hydride layer. Saturation of the previously formed W layer with silicon-hydrides is a crucial step in depositing the consecutive layer since these surface species act as the reductants in the succeeding dose of WF6. The SiH4 half-reaction reaches a limit when all fluorine atoms are removed as silicon-subfluorides (SiFxHy) and tungsten sites are terminated with silicon-hydrides. The WF6 dose reaches a limit in early doses when the reductant, i.e., the surface, becomes blocked due to the formation of a planar network of fluorine-containing tungsten intermediates and in later cycles when the reductant, i.e., adsorbed silicon-hydrides, is etched entirely from the surface. Overall, the calculated energetics indicate that WFxHy, SiFx, and H2 molecules are the most probable by-products released during the ALD process. Results from this work contribute significantly to the fundamental understanding of atomic layer growth of tungsten using silicon species as reducing agents and may be used as a template for analyzing novel ALD processes." @default.
• W2898006934 created "2018-10-26" @default.
• W2898006934 creator A5029693941 @default.
• W2898006934 creator A5043050660 @default.
• W2898006934 creator A5064519981 @default.
• W2898006934 creator A5067399651 @default.
• W2898006934 creator A5069216325 @default.
• W2898006934 date "2018-10-08" @default.
• W2898006934 modified "2023-09-27" @default.
• W2898006934 title "<i>Ab initio</i> analysis of nucleation reactions during tungsten atomic layer deposition on Si(100) and W(110) substrates" @default.
• W2898006934 cites W1976606328 @default.
• W2898006934 cites W1978748339 @default.
• W2898006934 cites W1986614779 @default.
• W2898006934 cites W1989229453 @default.
• W2898006934 cites W1989558450 @default.
• W2898006934 cites W1992985800 @default.
• W2898006934 cites W1994136425 @default.
• W2898006934 cites W2001408619 @default.
• W2898006934 cites W2007395042 @default.
• W2898006934 cites W2013514753 @default.
• W2898006934 cites W2030976617 @default.
• W2898006934 cites W2033098930 @default.
• W2898006934 cites W2045143949 @default.
• W2898006934 cites W2059548604 @default.
• W2898006934 cites W2064874511 @default.
• W2898006934 cites W2068440572 @default.
• W2898006934 cites W2070429397 @default.
• W2898006934 cites W2073379742 @default.
• W2898006934 cites W2086975853 @default.
• W2898006934 cites W2087641219 @default.
• W2898006934 cites W2087698390 @default.
• W2898006934 cites W2095297942 @default.
• W2898006934 cites W2109455667 @default.
• W2898006934 cites W2126360954 @default.
• W2898006934 cites W2144537008 @default.
• W2898006934 cites W2146383112 @default.
• W2898006934 cites W2158932701 @default.
• W2898006934 cites W2204918453 @default.
• W2898006934 cites W2227519154 @default.
• W2898006934 cites W2294019985 @default.
• W2898006934 cites W2518696367 @default.
• W2898006934 cites W2556404947 @default.
• W2898006934 cites W2729627840 @default.
• W2898006934 cites W2805065452 @default.
• W2898006934 doi "https://doi.org/10.1116/1.5044740" @default.
• W2898006934 hasPublicationYear "2018" @default.
• W2898006934 type Work @default.
• W2898006934 sameAs 2898006934 @default.
• W2898006934 citedByCount "4" @default.
• W2898006934 countsByYear W28980069342020 @default.
• W2898006934 countsByYear W28980069342021 @default.
• W2898006934 crossrefType "journal-article" @default.
• W2898006934 hasAuthorship W2898006934A5029693941 @default.
• W2898006934 hasAuthorship W2898006934A5043050660 @default.
• W2898006934 hasAuthorship W2898006934A5064519981 @default.
• W2898006934 hasAuthorship W2898006934A5067399651 @default.
• W2898006934 hasAuthorship W2898006934A5069216325 @default.
• W2898006934 hasConcept C100460472 @default.
• W2898006934 hasConcept C127413603 @default.
• W2898006934 hasConcept C147789679 @default.
• W2898006934 hasConcept C150394285 @default.
• W2898006934 hasConcept C159467904 @default.
• W2898006934 hasConcept C171250308 @default.
• W2898006934 hasConcept C178790620 @default.
• W2898006934 hasConcept C179104552 @default.
• W2898006934 hasConcept C185592680 @default.
• W2898006934 hasConcept C192562407 @default.
• W2898006934 hasConcept C2777961443 @default.
• W2898006934 hasConcept C2779227376 @default.
• W2898006934 hasConcept C42360764 @default.
• W2898006934 hasConcept C506198293 @default.
• W2898006934 hasConcept C512968161 @default.
• W2898006934 hasConcept C542268612 @default.
• W2898006934 hasConcept C544956773 @default.
• W2898006934 hasConcept C57410435 @default.
• W2898006934 hasConcept C61048295 @default.
• W2898006934 hasConcept C69544855 @default.
• W2898006934 hasConcept C7070889 @default.
• W2898006934 hasConceptScore W2898006934C100460472 @default.
• W2898006934 hasConceptScore W2898006934C127413603 @default.
• W2898006934 hasConceptScore W2898006934C147789679 @default.
• W2898006934 hasConceptScore W2898006934C150394285 @default.
• W2898006934 hasConceptScore W2898006934C159467904 @default.
• W2898006934 hasConceptScore W2898006934C171250308 @default.
• W2898006934 hasConceptScore W2898006934C178790620 @default.
• W2898006934 hasConceptScore W2898006934C179104552 @default.
• W2898006934 hasConceptScore W2898006934C185592680 @default.
• W2898006934 hasConceptScore W2898006934C192562407 @default.
• W2898006934 hasConceptScore W2898006934C2777961443 @default.
• W2898006934 hasConceptScore W2898006934C2779227376 @default.
• W2898006934 hasConceptScore W2898006934C42360764 @default.
• W2898006934 hasConceptScore W2898006934C506198293 @default.
• W2898006934 hasConceptScore W2898006934C512968161 @default.
• W2898006934 hasConceptScore W2898006934C542268612 @default.
• W2898006934 hasConceptScore W2898006934C544956773 @default.
• W2898006934 hasConceptScore W2898006934C57410435 @default.
• W2898006934 hasConceptScore W2898006934C61048295 @default.
• W2898006934 hasConceptScore W2898006934C69544855 @default.
• W2898006934 hasConceptScore W2898006934C7070889 @default.
• W2898006934 hasFunder F4320306087 @default.

• next