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- W289806545 abstract "In this paper, we verified basic forms and equivalent circuits of spiral inductors and various kinds of parasitics of equivalent circuits by using HFSS and Nexxim program that were 3-D EM analysis tools, and fabrication on-chip spiral inductors using Hynix's 0.25um 1-poly and 5-metal CMOS process. Comparing with PGS(patterned ground shield) and NPGS(non patterned ground shield) of spiral inductors of 3.5 turn, 4.5 turn and 5.5 turn, etc, the application of PGS could improve maximum Q value by 8-12%." @default.
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- W289806545 date "2007-01-01" @default.
- W289806545 modified "2023-09-28" @default.
- W289806545 title "The Fabrication of On-chip Spiral Inductors Through 3-D Field Analysis" @default.
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