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- W2898218079 endingPage "1800688" @default.
- W2898218079 startingPage "1800688" @default.
- W2898218079 abstract "Ultrathin 2D transition metal dichalcogenide (TMD) thin films have attracted much attention due to their very good electrical, optical, and electrochemical properties. Chemical vapor deposition (CVD) and atomic layer deposition (ALD), which is in some regards an enhanced version of CVD, are techniques that can provide exceptionally conformal large-area coatings, even for complex surface geometries. Besides, these techniques include the transport of one or more precursor chemicals in the gas phase onto a substrate. Subsequently, a chemical reaction occurs, resulting in the deposition of a film of a solid material on the substrate. One of the advantageous aspects of chemical deposition methods, such as CVD and ALD, is the growth of thin films onto a variety of substrates as well as 3D structures. Because of their chemical approach, these techniques are well suited to synthesizing 2D materials (2DMs) with a low defect concentration. Furthermore, the scalability would allow industrial application, as opposed to, e.g., micromechanical cleavage. Here, the recent progress in 2D TMD thin films is reviewed and the current applications of these materials fabricated by CVD and ALD are surveyed." @default.
- W2898218079 created "2018-11-02" @default.
- W2898218079 creator A5002617056 @default.
- W2898218079 creator A5022062431 @default.
- W2898218079 creator A5052508907 @default.
- W2898218079 date "2018-10-23" @default.
- W2898218079 modified "2023-09-25" @default.
- W2898218079 title "2D Transition Metal Dichalcogenide Thin Films Obtained by Chemical Gas Phase Deposition Techniques" @default.
- W2898218079 cites W1138016650 @default.
- W2898218079 cites W1182943379 @default.
- W2898218079 cites W1584937917 @default.
- W2898218079 cites W1718289729 @default.
- W2898218079 cites W1721726741 @default.
- W2898218079 cites W1770697966 @default.
- W2898218079 cites W1819718343 @default.
- W2898218079 cites W1844681765 @default.
- W2898218079 cites W1889540748 @default.
- W2898218079 cites W1890982838 @default.
- W2898218079 cites W1943109654 @default.
- W2898218079 cites W1943833960 @default.
- W2898218079 cites W1946340942 @default.
- W2898218079 cites W1946753601 @default.
- W2898218079 cites W1950329711 @default.
- W2898218079 cites W1950407595 @default.
- W2898218079 cites W1963860831 @default.
- W2898218079 cites W1965542092 @default.
- W2898218079 cites W1965810274 @default.
- W2898218079 cites W1970537635 @default.
- W2898218079 cites W1974326957 @default.
- W2898218079 cites W1976079097 @default.
- W2898218079 cites W1977042446 @default.
- W2898218079 cites W1982937407 @default.
- W2898218079 cites W1987145869 @default.
- W2898218079 cites W1988199244 @default.
- W2898218079 cites W1998042844 @default.
- W2898218079 cites W2000051214 @default.
- W2898218079 cites W2000395075 @default.
- W2898218079 cites W2002753701 @default.
- W2898218079 cites W2002847076 @default.
- W2898218079 cites W2004026087 @default.
- W2898218079 cites W2005382501 @default.
- W2898218079 cites W2008107859 @default.
- W2898218079 cites W2008375944 @default.
- W2898218079 cites W2008496997 @default.
- W2898218079 cites W2011899447 @default.
- W2898218079 cites W2015084612 @default.
- W2898218079 cites W2016367862 @default.
- W2898218079 cites W2016464593 @default.
- W2898218079 cites W2017305999 @default.
- W2898218079 cites W2017653514 @default.
- W2898218079 cites W2017871657 @default.
- W2898218079 cites W2018121477 @default.
- W2898218079 cites W2020156088 @default.
- W2898218079 cites W2023249057 @default.
- W2898218079 cites W2023566714 @default.
- W2898218079 cites W2025015431 @default.
- W2898218079 cites W2026207007 @default.
- W2898218079 cites W2029116464 @default.
- W2898218079 cites W2030873181 @default.
- W2898218079 cites W2031885404 @default.
- W2898218079 cites W2031999174 @default.
- W2898218079 cites W2033643976 @default.
- W2898218079 cites W2035453723 @default.
- W2898218079 cites W2035931858 @default.
- W2898218079 cites W2037811931 @default.
- W2898218079 cites W2040943220 @default.
- W2898218079 cites W2041433059 @default.
- W2898218079 cites W2042544461 @default.
- W2898218079 cites W2044854341 @default.
- W2898218079 cites W2045988635 @default.
- W2898218079 cites W2047331480 @default.
- W2898218079 cites W2047443163 @default.
- W2898218079 cites W2053081018 @default.
- W2898218079 cites W2055046377 @default.
- W2898218079 cites W2055569575 @default.
- W2898218079 cites W2058122340 @default.
- W2898218079 cites W2061605395 @default.
- W2898218079 cites W2062042016 @default.
- W2898218079 cites W2062259781 @default.
- W2898218079 cites W2065042482 @default.
- W2898218079 cites W2065264860 @default.
- W2898218079 cites W2068579447 @default.
- W2898218079 cites W2070400953 @default.
- W2898218079 cites W2070587900 @default.
- W2898218079 cites W2073161407 @default.
- W2898218079 cites W2074555133 @default.
- W2898218079 cites W2075282849 @default.
- W2898218079 cites W2076658228 @default.
- W2898218079 cites W2078204579 @default.
- W2898218079 cites W2079851049 @default.
- W2898218079 cites W2085347167 @default.
- W2898218079 cites W2087032948 @default.
- W2898218079 cites W2090172563 @default.
- W2898218079 cites W2092044679 @default.
- W2898218079 cites W2096015659 @default.
- W2898218079 cites W2096421416 @default.
- W2898218079 cites W2096899686 @default.
- W2898218079 cites W2097054476 @default.