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• W2899143003 abstract "This paper presents the design of a new compact one-degree-of-freedom (1-DOF) compliant stage driven by a piezoelectric actuator (PEA) for micro/nanopositioning in the vertical direction. An orthogonal compound bridge-type amplifier is introduced to amplify the displacement of the PEA. It significantly reduces the height of the stage and leads to a compact design. By analytical modeling of the mechanism, the design variables are determined, which are then optimized via the multiobjective genetic algorithm based on the finite-element analysis. Simulation results show that the 1-DOF stage is able to provide the maximum displacement of 181.18 μm in theory, which is more than 12 × the input displacement of PEA. Payload test results indicate that the stage can support a maximum load of about 80 N. Comparison study reveals that the presented vertical positioning stage offers a more compact structure than existing ones. A prototype is fabricated for experimental studies, and the deviation between the experimental and simulation results is discussed in detail. Moreover, closed-loop performance test exhibits a resolution of 10 nm for the developed vertical positioning stage." @default.
• W2899143003 created "2018-11-09" @default.
• W2899143003 creator A5018091137 @default.
• W2899143003 creator A5080576150 @default.
• W2899143003 date "2019-04-01" @default.
• W2899143003 modified "2023-10-16" @default.
• W2899143003 title "Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning" @default.
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• W2899143003 doi "https://doi.org/10.1109/tase.2018.2875711" @default.
• W2899143003 hasPublicationYear "2019" @default.
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