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• W2899353939 abstract "The scaling of polarization and pyroelectric response across a thickness series (5–20 nm) of Hf0.58Zr0.42O2 films with TaN electrodes was characterized. Reduction in thickness from 20 nm to 5 nm resulted in a decreased remanent polarization from 17 to 2.8 μC cm−2. Accompanying the decreased remanent polarization was an increased absolute pyroelectric coefficient, from 30 to 58 μC m−2 K−1. The pyroelectric response of the 5 nm film was unstable and decreased logarithmically with time, while that of 10 nm and thicker films was stable over a time scale of &gt;300 h at room temperature. The sign of the pyroelectric response was irreversible with differing polarity of poling bias for the 5 nm thick film, indicating that the enhanced pyroelectric response was of electret origins, whereas the pyroelectric response in thicker films was consistent with a crystallographic origin." @default.
• W2899353939 created "2018-11-09" @default.
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• W2899353939 date "2018-10-29" @default.
• W2899353939 modified "2023-09-26" @default.
• W2899353939 title "Thickness scaling of pyroelectric response in thin ferroelectric Hf₁₋_<i>x</i>Zr_<i>x</i>O₂ films" @default.
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• W2899353939 doi "https://doi.org/10.1063/1.5045635" @default.
• W2899353939 hasPublicationYear "2018" @default.
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