Matches in SemOpenAlex for { <https://semopenalex.org/work/W2899355834> ?p ?o ?g. }
Showing items 1 to 62 of
62
with 100 items per page.
- W2899355834 endingPage "0112002" @default.
- W2899355834 startingPage "0112002" @default.
- W2899355834 abstract "A dynamic source mask optimization (SMO) method is developed. The dynamic SMO method uses a dynamic fitness function in genetic algorithm to simulate the process variations in real lithography process. So the imaging quality of the optimized source and mask is not sensitive to the process errors. The dynamic SMO method can get similar result as the conventional weighted SMO method without the necessity of weighting coefficient optimization. Simulation results show that the dynamic method can get a usable defocus of 200 nm when the dose error is 15%. This is comparable with the optimized result of the weighted method. The dynamic SMO method can be also used to make the optimized source and mask less sensitive to other process errors, such as coma errors." @default.
- W2899355834 created "2018-11-09" @default.
- W2899355834 creator A5036391493 @default.
- W2899355834 creator A5038021378 @default.
- W2899355834 creator A5049256787 @default.
- W2899355834 creator A5056620194 @default.
- W2899355834 creator A5071427035 @default.
- W2899355834 creator A5072099200 @default.
- W2899355834 date "2016-01-01" @default.
- W2899355834 modified "2023-09-25" @default.
- W2899355834 title "Aberration Measurement Method for Hyper-NA Lithographic Projection Lens" @default.
- W2899355834 doi "https://doi.org/10.3788/aos201636.0112002" @default.
- W2899355834 hasPublicationYear "2016" @default.
- W2899355834 type Work @default.
- W2899355834 sameAs 2899355834 @default.
- W2899355834 citedByCount "0" @default.
- W2899355834 crossrefType "journal-article" @default.
- W2899355834 hasAuthorship W2899355834A5036391493 @default.
- W2899355834 hasAuthorship W2899355834A5038021378 @default.
- W2899355834 hasAuthorship W2899355834A5049256787 @default.
- W2899355834 hasAuthorship W2899355834A5056620194 @default.
- W2899355834 hasAuthorship W2899355834A5071427035 @default.
- W2899355834 hasAuthorship W2899355834A5072099200 @default.
- W2899355834 hasConcept C11413529 @default.
- W2899355834 hasConcept C120665830 @default.
- W2899355834 hasConcept C121332964 @default.
- W2899355834 hasConcept C15336307 @default.
- W2899355834 hasConcept C192562407 @default.
- W2899355834 hasConcept C204223013 @default.
- W2899355834 hasConcept C41008148 @default.
- W2899355834 hasConcept C57493831 @default.
- W2899355834 hasConcept C70638346 @default.
- W2899355834 hasConceptScore W2899355834C11413529 @default.
- W2899355834 hasConceptScore W2899355834C120665830 @default.
- W2899355834 hasConceptScore W2899355834C121332964 @default.
- W2899355834 hasConceptScore W2899355834C15336307 @default.
- W2899355834 hasConceptScore W2899355834C192562407 @default.
- W2899355834 hasConceptScore W2899355834C204223013 @default.
- W2899355834 hasConceptScore W2899355834C41008148 @default.
- W2899355834 hasConceptScore W2899355834C57493831 @default.
- W2899355834 hasConceptScore W2899355834C70638346 @default.
- W2899355834 hasIssue "1" @default.
- W2899355834 hasLocation W28993558341 @default.
- W2899355834 hasOpenAccess W2899355834 @default.
- W2899355834 hasPrimaryLocation W28993558341 @default.
- W2899355834 hasRelatedWork W1966161267 @default.
- W2899355834 hasRelatedWork W2004206857 @default.
- W2899355834 hasRelatedWork W2027433236 @default.
- W2899355834 hasRelatedWork W2060349980 @default.
- W2899355834 hasRelatedWork W2071813595 @default.
- W2899355834 hasRelatedWork W2133896566 @default.
- W2899355834 hasRelatedWork W2169075405 @default.
- W2899355834 hasRelatedWork W2804527771 @default.
- W2899355834 hasRelatedWork W3037772366 @default.
- W2899355834 hasRelatedWork W2204099672 @default.
- W2899355834 hasVolume "36" @default.
- W2899355834 isParatext "false" @default.
- W2899355834 isRetracted "false" @default.
- W2899355834 magId "2899355834" @default.
- W2899355834 workType "article" @default.