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• W2899983411 endingPage "106" @default.
• W2899983411 startingPage "101" @default.
• W2899983411 abstract "We propose a novel alignment method with nanoscale precision and hundreds of microns detecting range for proximity lithography. With this method, both coarse and final alignments are realized by complex grating based on moiré fringe. For distinguishing the complex gratings in frequency spectrum, there is no interference between the coarse and the final alignment parts. Within only one pattern, modulation of the coarse mark and phase of the final mark can be calculated respectively. Combining the two results, we can do the alignment with nanoscale precision in large measurement range. Furthermore, the structure of our measurement system is simple. Simulation and experiments are carried out to validate the feasibility of the proposed method." @default.
• W2899983411 created "2018-11-16" @default.
• W2899983411 creator A5019041222 @default.
• W2899983411 creator A5034876495 @default.
• W2899983411 creator A5042713302 @default.
• W2899983411 creator A5046760503 @default.
• W2899983411 creator A5049509717 @default.
• W2899983411 creator A5080601331 @default.
• W2899983411 date "2019-04-01" @default.
• W2899983411 modified "2023-10-18" @default.
• W2899983411 title "Large range nano alignment for proximity lithography using complex grating" @default.
• W2899983411 cites W1990077895 @default.
• W2899983411 cites W2006679895 @default.
• W2899983411 cites W2010995525 @default.
• W2899983411 cites W2018586229 @default.
• W2899983411 cites W2020481731 @default.
• W2899983411 cites W2020952619 @default.
• W2899983411 cites W2031079875 @default.
• W2899983411 cites W2033594276 @default.
• W2899983411 cites W2043231702 @default.
• W2899983411 cites W2062047511 @default.
• W2899983411 cites W2068888675 @default.
• W2899983411 cites W2071841963 @default.
• W2899983411 cites W2081206579 @default.
• W2899983411 cites W2108451729 @default.
• W2899983411 cites W2162450794 @default.
• W2899983411 cites W2228772379 @default.
• W2899983411 doi "https://doi.org/10.1016/j.optlastec.2018.10.049" @default.
• W2899983411 hasPublicationYear "2019" @default.
• W2899983411 type Work @default.
• W2899983411 sameAs 2899983411 @default.
• W2899983411 citedByCount "3" @default.
• W2899983411 countsByYear W28999834112020 @default.
• W2899983411 countsByYear W28999834112023 @default.
• W2899983411 crossrefType "journal-article" @default.
• W2899983411 hasAuthorship W2899983411A5019041222 @default.
• W2899983411 hasAuthorship W2899983411A5034876495 @default.
• W2899983411 hasAuthorship W2899983411A5042713302 @default.
• W2899983411 hasAuthorship W2899983411A5046760503 @default.
• W2899983411 hasAuthorship W2899983411A5049509717 @default.
• W2899983411 hasAuthorship W2899983411A5080601331 @default.
• W2899983411 hasConcept C120665830 @default.
• W2899983411 hasConcept C121332964 @default.
• W2899983411 hasConcept C127162648 @default.
• W2899983411 hasConcept C136525101 @default.
• W2899983411 hasConcept C142724271 @default.
• W2899983411 hasConcept C159395582 @default.
• W2899983411 hasConcept C159985019 @default.
• W2899983411 hasConcept C171250308 @default.
• W2899983411 hasConcept C192562407 @default.
• W2899983411 hasConcept C204223013 @default.
• W2899983411 hasConcept C204323151 @default.
• W2899983411 hasConcept C204787440 @default.
• W2899983411 hasConcept C2777813233 @default.
• W2899983411 hasConcept C32022120 @default.
• W2899983411 hasConcept C41008148 @default.
• W2899983411 hasConcept C44280652 @default.
• W2899983411 hasConcept C45206210 @default.
• W2899983411 hasConcept C62520636 @default.
• W2899983411 hasConcept C70000540 @default.
• W2899983411 hasConcept C71924100 @default.
• W2899983411 hasConcept C76155785 @default.
• W2899983411 hasConceptScore W2899983411C120665830 @default.
• W2899983411 hasConceptScore W2899983411C121332964 @default.
• W2899983411 hasConceptScore W2899983411C127162648 @default.
• W2899983411 hasConceptScore W2899983411C136525101 @default.
• W2899983411 hasConceptScore W2899983411C142724271 @default.
• W2899983411 hasConceptScore W2899983411C159395582 @default.
• W2899983411 hasConceptScore W2899983411C159985019 @default.
• W2899983411 hasConceptScore W2899983411C171250308 @default.
• W2899983411 hasConceptScore W2899983411C192562407 @default.
• W2899983411 hasConceptScore W2899983411C204223013 @default.
• W2899983411 hasConceptScore W2899983411C204323151 @default.
• W2899983411 hasConceptScore W2899983411C204787440 @default.
• W2899983411 hasConceptScore W2899983411C2777813233 @default.
• W2899983411 hasConceptScore W2899983411C32022120 @default.
• W2899983411 hasConceptScore W2899983411C41008148 @default.
• W2899983411 hasConceptScore W2899983411C44280652 @default.
• W2899983411 hasConceptScore W2899983411C45206210 @default.
• W2899983411 hasConceptScore W2899983411C62520636 @default.
• W2899983411 hasConceptScore W2899983411C70000540 @default.
• W2899983411 hasConceptScore W2899983411C71924100 @default.
• W2899983411 hasConceptScore W2899983411C76155785 @default.
• W2899983411 hasFunder F4320321001 @default.
• W2899983411 hasFunder F4320321133 @default.
• W2899983411 hasFunder F4320322990 @default.
• W2899983411 hasLocation W28999834111 @default.
• W2899983411 hasOpenAccess W2899983411 @default.
• W2899983411 hasPrimaryLocation W28999834111 @default.
• W2899983411 hasRelatedWork W1966335330 @default.
• W2899983411 hasRelatedWork W1977975771 @default.
• W2899983411 hasRelatedWork W1994676544 @default.
• W2899983411 hasRelatedWork W2004583892 @default.
• W2899983411 hasRelatedWork W2007107749 @default.
• W2899983411 hasRelatedWork W2026775513 @default.
• W2899983411 hasRelatedWork W2061849362 @default.
• W2899983411 hasRelatedWork W2106801856 @default.
• W2899983411 hasRelatedWork W2346601378 @default.

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