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- W2900817973 abstract "The paper reports on a study of the vacuum arc plasma produced with a lanthanum hexaboride and a boron carbide cathode for technological high-dose ion implantation. Compared to pure boron, these boron compounds are much more conducting, provide the operation of cathodic arcs with a current of hundred amperes and pulse duration of hundred microseconds, and allow the generation of boron-rich plasmas. The parameters of such plasma, including its mass-charge state measured by a time-of-flight spectrometer, are presented." @default.
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- W2900817973 date "2018-09-01" @default.
- W2900817973 modified "2023-09-24" @default.
- W2900817973 title "Vacuum Arc with Boron-Containing Cathode" @default.
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- W2900817973 doi "https://doi.org/10.1109/deiv.2018.8537048" @default.
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