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- W2900963419 abstract "A systematic study of kinetics and thermodynamics of Si (111) surface nitridation under ammonia exposure is presented. The appeared silicon nitride (8 × 8) structure is found to be a metastable phase. Experimental evidences of graphene-like nature of the silicon nitride (8 × 8) structure are presented. Interlayer spacings in the (SiN)2(AlN)4 structure on the Si (111) surface are found equal to 3.3 Å in SiN and 2.86 Å in AlN. These interlayer spacings correspond to weak van der Waals interaction between layers. In contrast to the widely accepted model of a surface structure (8 × 8) as monolayer of β-Si3N4 on Si (111) surface, we propose a new graphene-like Si3N4 (g-Si3N3 and/or g-Si3N4) model for the (8 × 8) structure. It is revealed that the deposition of Al atoms on top of a highly ordered (8 × 8) structure results in graphene-like AlN (g-AlN) layers formation. The g-AlN lattice constant of 3.08 Å is found in a good agreement with the ab initio calculations. A transformation of the g-AlN to the bulk-like wurtzite AlN is analyzed." @default.
- W2900963419 created "2018-11-29" @default.
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- W2900963419 date "2019-10-09" @default.
- W2900963419 modified "2023-10-02" @default.
- W2900963419 title "Van der Waals and Graphene-Like Layers of Silicon Nitride and Aluminum Nitride" @default.
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- W2900963419 doi "https://doi.org/10.5772/intechopen.81775" @default.
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