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- W2901685897 abstract "A novel nanocrystal-embedded-insulator (NEI) ferroelectric negative capacitance field-effect transistor (NCFET) is proposed and demonstrated. The NEI layer comprises orthorhombic ZrO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> nanocrystals embedded in amorphous Al <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> , as confirmed by high-resolution scanning transmission electronmicroscopy and diffraction analysis. The ferroelectric nature of NEI is proved by polarization-voltage measurements, piezoresponse force microscopy, and electrical measurements. The NEI NCFET achieves superior subthreshold swing (SS) and drive current compared with a control MOSFET with the same Al <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> gate insulator thickness. Sub-60-mV/decade SS is also maintained through multiple DC sweeping cycles." @default.
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- W2901685897 date "2018-01-01" @default.
- W2901685897 modified "2023-10-01" @default.
- W2901685897 title "Nanocrystal-Embedded-Insulator Ferroelectric Negative Capacitance FETs with Sub-kT/q Swing" @default.
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- W2901685897 doi "https://doi.org/10.1109/led.2018.2881839" @default.
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