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• W290174783 abstract "Although fully satisfactory models to explain the presence of ions and excited states in the sputtered flux do not exist, it is possible to indicate with fair detail what the models will have to describe. That is, what might be termed “boundary conditions” can be set up. For example, ions have significantly lower kinetic energies, and at the same time higher yields, than excited states. Ions are an order of magnitude smaller than excited states and appear to form in events resembling cascade sputtering, whereas excited states are large and appear to form in events resembling binary collisions. In a few respects ions are like excited states, including in the relative yields showing an approximately exponential dependence on the internal energy and in evidence for degeneracy playing a role. In the case of ions the information available is not particularly restrictive and therefore does not point the way to developing a mechanism. The converse is true for excited states, especially the matter of the high kinetic energies and large sizes. We therefore pursue a model involving random, inelastic energy transfer. The model accomodates easily to high kinetic energies, to relative yields showing an approximately exponential dependence on the internal energy, to large sizes, and to most other details." @default.
• W290174783 created "2016-06-24" @default.
• W290174783 creator A5070903129 @default.
• W290174783 date "1981-01-01" @default.
• W290174783 modified "2023-10-18" @default.
• W290174783 title "Boundary Conditions for Models of Ion and Excited-State Formation in the Sputtering Process" @default.
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• W290174783 doi "https://doi.org/10.1007/978-3-642-87065-1_21" @default.
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