Matches in SemOpenAlex for { <https://semopenalex.org/work/W2901799738> ?p ?o ?g. }
- W2901799738 endingPage "137" @default.
- W2901799738 startingPage "127" @default.
- W2901799738 abstract "Adding silicon to sputtered amorphous carbon films is a promising approach to enhance tribo-mechanical properties. Although most works analyse the influence of one specific deposition parameter, the Design of Experiments is a more suitable method to investigate the cause-effect relation between the parameters on the properties of silicon-containing amorphous carbon (a-C:Si) films. In a sputtering process, the cathode power of the silicon target and the bias voltage were simultaneously varied from 217 to 783 W and −83 to −197 V, based on the Central Composite Design. The modification of the chemical composition was evaluated by means of glow-discharge optical emission spectroscopy. To analyse the influence of the silicon content and bias voltage on the tribo-mechanical properties, the hardness and elastic modulus were determined by nanoindentation, while the friction and wear behaviour were investigated in tribometer tests utilizing 100Cr6 counterparts. The silicon content increases linearly from 8.6 to 31.7 at.-% with an increasing cathode power without any impact of the bias voltage. However, an interaction between the two parameters is observed for the mechanical properties. At a high Si content and high bias voltage, the a-C:Si films show a high hardness of 22.0 ± 1.0 GPa and a high elastic modulus of 231.7 ± 10.6 GPa. In contrast, the lowest hardness of 18.1 ± 0.7 GPa and lowest elastic modulus of 203.2 ± 9.6 GPa are obtained at a low Si content and low bias voltage. The lowest coefficient of friction of 0.083 ± 0.029 as well as the lowest wear coefficients of 0.094 ± 0.025 × 10−5 mm3/N × m were obtained by a-C:Si films with a small amount of silicon. It was determined that the tribo-mechanical properties of a-C:Si films are interactively influenced by the silicon content and bias voltage. In this context, the Central Composite Design is an efficient method to obtain fundamental knowledge concerning the interrelation between these parameters." @default.
- W2901799738 created "2018-11-29" @default.
- W2901799738 creator A5020004541 @default.
- W2901799738 creator A5025718499 @default.
- W2901799738 creator A5037260669 @default.
- W2901799738 date "2019-01-01" @default.
- W2901799738 modified "2023-09-26" @default.
- W2901799738 title "Investigation of the tribo-mechanical properties of sputtered a-C:Si films using design of experiments" @default.
- W2901799738 cites W1963926704 @default.
- W2901799738 cites W1970533496 @default.
- W2901799738 cites W1980163796 @default.
- W2901799738 cites W1980173422 @default.
- W2901799738 cites W1981528685 @default.
- W2901799738 cites W1986926566 @default.
- W2901799738 cites W1987373744 @default.
- W2901799738 cites W1988822899 @default.
- W2901799738 cites W2000161938 @default.
- W2901799738 cites W2000306068 @default.
- W2901799738 cites W2003057801 @default.
- W2901799738 cites W2008870712 @default.
- W2901799738 cites W2014701263 @default.
- W2901799738 cites W2017618055 @default.
- W2901799738 cites W2037376735 @default.
- W2901799738 cites W2038622926 @default.
- W2901799738 cites W2048877752 @default.
- W2901799738 cites W2071216581 @default.
- W2901799738 cites W2073428798 @default.
- W2901799738 cites W2074884235 @default.
- W2901799738 cites W2078388259 @default.
- W2901799738 cites W2082280184 @default.
- W2901799738 cites W2086933933 @default.
- W2901799738 cites W2088884248 @default.
- W2901799738 cites W2090116919 @default.
- W2901799738 cites W2093512117 @default.
- W2901799738 cites W2108174585 @default.
- W2901799738 cites W2124576342 @default.
- W2901799738 cites W2131543960 @default.
- W2901799738 cites W2138265279 @default.
- W2901799738 cites W2291240565 @default.
- W2901799738 cites W2324332412 @default.
- W2901799738 cites W2523138850 @default.
- W2901799738 cites W2548222103 @default.
- W2901799738 cites W2789178907 @default.
- W2901799738 cites W2899234245 @default.
- W2901799738 cites W2012359081 @default.
- W2901799738 doi "https://doi.org/10.1016/j.diamond.2018.11.014" @default.
- W2901799738 hasPublicationYear "2019" @default.
- W2901799738 type Work @default.
- W2901799738 sameAs 2901799738 @default.
- W2901799738 citedByCount "4" @default.
- W2901799738 countsByYear W29017997382020 @default.
- W2901799738 countsByYear W29017997382021 @default.
- W2901799738 countsByYear W29017997382022 @default.
- W2901799738 crossrefType "journal-article" @default.
- W2901799738 hasAuthorship W2901799738A5020004541 @default.
- W2901799738 hasAuthorship W2901799738A5025718499 @default.
- W2901799738 hasAuthorship W2901799738A5037260669 @default.
- W2901799738 hasConcept C119599485 @default.
- W2901799738 hasConcept C127413603 @default.
- W2901799738 hasConcept C159985019 @default.
- W2901799738 hasConcept C162681261 @default.
- W2901799738 hasConcept C165801399 @default.
- W2901799738 hasConcept C167310744 @default.
- W2901799738 hasConcept C171250308 @default.
- W2901799738 hasConcept C185592680 @default.
- W2901799738 hasConcept C19067145 @default.
- W2901799738 hasConcept C191897082 @default.
- W2901799738 hasConcept C192562407 @default.
- W2901799738 hasConcept C20254490 @default.
- W2901799738 hasConcept C22423302 @default.
- W2901799738 hasConcept C43486711 @default.
- W2901799738 hasConcept C49326732 @default.
- W2901799738 hasConcept C544956773 @default.
- W2901799738 hasConcept C56052488 @default.
- W2901799738 hasConcept C61427134 @default.
- W2901799738 hasConcept C8010536 @default.
- W2901799738 hasConceptScore W2901799738C119599485 @default.
- W2901799738 hasConceptScore W2901799738C127413603 @default.
- W2901799738 hasConceptScore W2901799738C159985019 @default.
- W2901799738 hasConceptScore W2901799738C162681261 @default.
- W2901799738 hasConceptScore W2901799738C165801399 @default.
- W2901799738 hasConceptScore W2901799738C167310744 @default.
- W2901799738 hasConceptScore W2901799738C171250308 @default.
- W2901799738 hasConceptScore W2901799738C185592680 @default.
- W2901799738 hasConceptScore W2901799738C19067145 @default.
- W2901799738 hasConceptScore W2901799738C191897082 @default.
- W2901799738 hasConceptScore W2901799738C192562407 @default.
- W2901799738 hasConceptScore W2901799738C20254490 @default.
- W2901799738 hasConceptScore W2901799738C22423302 @default.
- W2901799738 hasConceptScore W2901799738C43486711 @default.
- W2901799738 hasConceptScore W2901799738C49326732 @default.
- W2901799738 hasConceptScore W2901799738C544956773 @default.
- W2901799738 hasConceptScore W2901799738C56052488 @default.
- W2901799738 hasConceptScore W2901799738C61427134 @default.
- W2901799738 hasConceptScore W2901799738C8010536 @default.
- W2901799738 hasLocation W29017997381 @default.
- W2901799738 hasOpenAccess W2901799738 @default.
- W2901799738 hasPrimaryLocation W29017997381 @default.