FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2901902009> ?p ?o ?g. }

• W2901902009 abstract "Ultrathin aluminum nitride (AlN) films are of great interest for integration into nanoelectromechanical systems for actuation and sensing. Given the direct relationship between crystallographic texture and piezoelectric (PZE) response, x-ray diffraction has become an important metrology step. However, signals from layers deposited below the PZE AlN thin film may skew the crystallographic analysis and give misleading results. In this work, the authors compare the use of a Ti or AlN seed layer on the crystallographic quality of PZE AlN. The authors also analyze the influence of several AlN seed layer thicknesses on the rocking curve FWHM of PZE AlN and demonstrate a larger effect of the AlN seed layer on the θ-2θ AlN &lt;0002&gt; crystallographic peak for increasing AlN seed layer thickness." @default.
• W2901902009 created "2018-11-29" @default.
• W2901902009 creator A5025408507 @default.
• W2901902009 creator A5025457422 @default.
• W2901902009 creator A5053190215 @default.
• W2901902009 creator A5055297107 @default.
• W2901902009 creator A5073152537 @default.
• W2901902009 creator A5084245317 @default.
• W2901902009 date "2019-01-09" @default.
• W2901902009 modified "2023-10-10" @default.
• W2901902009 title "Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN" @default.
• W2901902009 cites W1529543554 @default.
• W2901902009 cites W1971534932 @default.
• W2901902009 cites W2017939510 @default.
• W2901902009 cites W2028803173 @default.
• W2901902009 cites W2033562417 @default.
• W2901902009 cites W2036215373 @default.
• W2901902009 cites W2039406684 @default.
• W2901902009 cites W2041690766 @default.
• W2901902009 cites W2043416085 @default.
• W2901902009 cites W2046104316 @default.
• W2901902009 cites W2049558367 @default.
• W2901902009 cites W2050890807 @default.
• W2901902009 cites W2058086719 @default.
• W2901902009 cites W2069508161 @default.
• W2901902009 cites W2070967937 @default.
• W2901902009 cites W2074213151 @default.
• W2901902009 cites W2079540067 @default.
• W2901902009 cites W2085883277 @default.
• W2901902009 cites W2095647535 @default.
• W2901902009 cites W2097511512 @default.
• W2901902009 cites W2100506356 @default.
• W2901902009 cites W2113430407 @default.
• W2901902009 cites W2117356296 @default.
• W2901902009 cites W2118418514 @default.
• W2901902009 cites W2142023360 @default.
• W2901902009 cites W2171376220 @default.
• W2901902009 cites W2171773216 @default.
• W2901902009 cites W2317810346 @default.
• W2901902009 cites W2539740056 @default.
• W2901902009 cites W2592779861 @default.
• W2901902009 cites W2790120457 @default.
• W2901902009 cites W4292487398 @default.
• W2901902009 cites W4322734432 @default.
• W2901902009 cites W4367138788 @default.
• W2901902009 doi "https://doi.org/10.1116/1.5082888" @default.
• W2901902009 hasPublicationYear "2019" @default.
• W2901902009 type Work @default.
• W2901902009 sameAs 2901902009 @default.
• W2901902009 citedByCount "7" @default.
• W2901902009 countsByYear W29019020092019 @default.
• W2901902009 countsByYear W29019020092020 @default.
• W2901902009 countsByYear W29019020092021 @default.
• W2901902009 countsByYear W29019020092022 @default.
• W2901902009 countsByYear W29019020092023 @default.
• W2901902009 crossrefType "journal-article" @default.
• W2901902009 hasAuthorship W2901902009A5025408507 @default.
• W2901902009 hasAuthorship W2901902009A5025457422 @default.
• W2901902009 hasAuthorship W2901902009A5053190215 @default.
• W2901902009 hasAuthorship W2901902009A5055297107 @default.
• W2901902009 hasAuthorship W2901902009A5073152537 @default.
• W2901902009 hasAuthorship W2901902009A5084245317 @default.
• W2901902009 hasBestOaLocation W29019020092 @default.
• W2901902009 hasConcept C100082104 @default.
• W2901902009 hasConcept C108649604 @default.
• W2901902009 hasConcept C115961682 @default.
• W2901902009 hasConcept C120665830 @default.
• W2901902009 hasConcept C121332964 @default.
• W2901902009 hasConcept C154945302 @default.
• W2901902009 hasConcept C159985019 @default.
• W2901902009 hasConcept C171250308 @default.
• W2901902009 hasConcept C185592680 @default.
• W2901902009 hasConcept C19067145 @default.
• W2901902009 hasConcept C192562407 @default.
• W2901902009 hasConcept C194760766 @default.
• W2901902009 hasConcept C207114421 @default.
• W2901902009 hasConcept C2779227376 @default.
• W2901902009 hasConcept C2781195486 @default.
• W2901902009 hasConcept C41008148 @default.
• W2901902009 hasConcept C49040817 @default.
• W2901902009 hasConcept C50515024 @default.
• W2901902009 hasConcept C513153333 @default.
• W2901902009 hasConcept C8010536 @default.
• W2901902009 hasConceptScore W2901902009C100082104 @default.
• W2901902009 hasConceptScore W2901902009C108649604 @default.
• W2901902009 hasConceptScore W2901902009C115961682 @default.
• W2901902009 hasConceptScore W2901902009C120665830 @default.
• W2901902009 hasConceptScore W2901902009C121332964 @default.
• W2901902009 hasConceptScore W2901902009C154945302 @default.
• W2901902009 hasConceptScore W2901902009C159985019 @default.
• W2901902009 hasConceptScore W2901902009C171250308 @default.
• W2901902009 hasConceptScore W2901902009C185592680 @default.
• W2901902009 hasConceptScore W2901902009C19067145 @default.
• W2901902009 hasConceptScore W2901902009C192562407 @default.
• W2901902009 hasConceptScore W2901902009C194760766 @default.
• W2901902009 hasConceptScore W2901902009C207114421 @default.
• W2901902009 hasConceptScore W2901902009C2779227376 @default.
• W2901902009 hasConceptScore W2901902009C2781195486 @default.
• W2901902009 hasConceptScore W2901902009C41008148 @default.
• W2901902009 hasConceptScore W2901902009C49040817 @default.

• next