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• W2902617102 abstract "The effect of field enhancement at Fin corners on program characteristics of FinFET Split-gate metal oxide nitride oxide silicon (SG-MONOS) is analyzed. The program characteristics using source-side injection (SSI) are found to be insensitive to the variation of the curvature radius at Fin corners, which shows the robustness of FinFET SG-MONOS to Fin shape variation inthe fabrication process." @default.
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• W2902617102 date "2018-09-01" @default.
• W2902617102 modified "2023-10-17" @default.
• W2902617102 title "Analysis of the Effect of Field Enhancement at Fin Corners on Program Characteristics of FinFET Split-Gate MONOS" @default.
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• W2902617102 doi "https://doi.org/10.1109/sispad.2018.8551742" @default.
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