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- W2903637246 abstract "We report on the large area stress free single crystal silicon (Si) layer transfer onto glass substrate using hydrogen ion (H+) implantation and heterogeneous direct wafer bonding (DWB) (ion-cut process). Si wafers were implanted with H+ ions at room temperature followed by the DWB between the Si wafer and glass substrate. Post-implantation annealing studies were performed at different temperatures. The root mean square surface roughness of the H-implanted Si wafer and glass substrate was measured to be 0.3 nm and 0.5 nm, respectively. At an annealing temperature of 330 °C, a thin layer of the Si wafer was transferred onto the glass substrate. The average thickness of the transferred layer was found to be ~605 nm with surface roughness of 4 nm. Raman spectroscopy confirmed that the transferred Si layer was stress free and retained its crystallinity. Large area transfer of high quality stress free Si-on-glass substrate is demonstrated using heterogeneous DWB and ion-cut process." @default.
- W2903637246 created "2018-12-22" @default.
- W2903637246 creator A5023448667 @default.
- W2903637246 creator A5026609783 @default.
- W2903637246 creator A5060669768 @default.
- W2903637246 creator A5079893845 @default.
- W2903637246 date "2019-01-07" @default.
- W2903637246 modified "2023-09-24" @default.
- W2903637246 title "Large area stress free Si layer transfer onto Corning glass substrate using ion-cut" @default.
- W2903637246 cites W1966396217 @default.
- W2903637246 cites W1967929639 @default.
- W2903637246 cites W1968924121 @default.
- W2903637246 cites W1973671776 @default.
- W2903637246 cites W1991479346 @default.
- W2903637246 cites W1996536418 @default.
- W2903637246 cites W2001399601 @default.
- W2903637246 cites W2020739293 @default.
- W2903637246 cites W2033848413 @default.
- W2903637246 cites W2045174233 @default.
- W2903637246 cites W2057592630 @default.
- W2903637246 cites W2073436270 @default.
- W2903637246 cites W2074573567 @default.
- W2903637246 cites W2074623937 @default.
- W2903637246 cites W2085446160 @default.
- W2903637246 cites W2087250698 @default.
- W2903637246 cites W2090005546 @default.
- W2903637246 cites W2120238222 @default.
- W2903637246 cites W2140688124 @default.
- W2903637246 cites W2145728421 @default.
- W2903637246 cites W2167896570 @default.
- W2903637246 cites W2724373683 @default.
- W2903637246 cites W4248907494 @default.
- W2903637246 doi "https://doi.org/10.1088/1361-6641/aaf611" @default.
- W2903637246 hasPublicationYear "2019" @default.
- W2903637246 type Work @default.
- W2903637246 sameAs 2903637246 @default.
- W2903637246 citedByCount "1" @default.
- W2903637246 countsByYear W29036372462020 @default.
- W2903637246 crossrefType "journal-article" @default.
- W2903637246 hasAuthorship W2903637246A5023448667 @default.
- W2903637246 hasAuthorship W2903637246A5026609783 @default.
- W2903637246 hasAuthorship W2903637246A5060669768 @default.
- W2903637246 hasAuthorship W2903637246A5079893845 @default.
- W2903637246 hasConcept C107365816 @default.
- W2903637246 hasConcept C111368507 @default.
- W2903637246 hasConcept C113196181 @default.
- W2903637246 hasConcept C120665830 @default.
- W2903637246 hasConcept C121332964 @default.
- W2903637246 hasConcept C127313418 @default.
- W2903637246 hasConcept C159985019 @default.
- W2903637246 hasConcept C160671074 @default.
- W2903637246 hasConcept C185592680 @default.
- W2903637246 hasConcept C192562407 @default.
- W2903637246 hasConcept C2777289219 @default.
- W2903637246 hasConcept C2777855556 @default.
- W2903637246 hasConcept C2779133538 @default.
- W2903637246 hasConcept C2779227376 @default.
- W2903637246 hasConcept C40003534 @default.
- W2903637246 hasConcept C43617362 @default.
- W2903637246 hasConcept C46275449 @default.
- W2903637246 hasConcept C49040817 @default.
- W2903637246 hasConcept C544956773 @default.
- W2903637246 hasConceptScore W2903637246C107365816 @default.
- W2903637246 hasConceptScore W2903637246C111368507 @default.
- W2903637246 hasConceptScore W2903637246C113196181 @default.
- W2903637246 hasConceptScore W2903637246C120665830 @default.
- W2903637246 hasConceptScore W2903637246C121332964 @default.
- W2903637246 hasConceptScore W2903637246C127313418 @default.
- W2903637246 hasConceptScore W2903637246C159985019 @default.
- W2903637246 hasConceptScore W2903637246C160671074 @default.
- W2903637246 hasConceptScore W2903637246C185592680 @default.
- W2903637246 hasConceptScore W2903637246C192562407 @default.
- W2903637246 hasConceptScore W2903637246C2777289219 @default.
- W2903637246 hasConceptScore W2903637246C2777855556 @default.
- W2903637246 hasConceptScore W2903637246C2779133538 @default.
- W2903637246 hasConceptScore W2903637246C2779227376 @default.
- W2903637246 hasConceptScore W2903637246C40003534 @default.
- W2903637246 hasConceptScore W2903637246C43617362 @default.
- W2903637246 hasConceptScore W2903637246C46275449 @default.
- W2903637246 hasConceptScore W2903637246C49040817 @default.
- W2903637246 hasConceptScore W2903637246C544956773 @default.
- W2903637246 hasLocation W29036372461 @default.
- W2903637246 hasOpenAccess W2903637246 @default.
- W2903637246 hasPrimaryLocation W29036372461 @default.
- W2903637246 hasRelatedWork W1921331855 @default.
- W2903637246 hasRelatedWork W1979432543 @default.
- W2903637246 hasRelatedWork W2013557620 @default.
- W2903637246 hasRelatedWork W2031523458 @default.
- W2903637246 hasRelatedWork W2037871420 @default.
- W2903637246 hasRelatedWork W2052341660 @default.
- W2903637246 hasRelatedWork W2077224725 @default.
- W2903637246 hasRelatedWork W2117179983 @default.
- W2903637246 hasRelatedWork W2226130610 @default.
- W2903637246 hasRelatedWork W2617395629 @default.
- W2903637246 isParatext "false" @default.
- W2903637246 isRetracted "false" @default.
- W2903637246 magId "2903637246" @default.
- W2903637246 workType "article" @default.