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- W2903662073 abstract "Abstract SSD (Subsurface damage) appears on optical elements after grinding, and do harm to the further quality improvement. HF etching can remove SSD and help following polishing processes, which improve polishing efficiency and quality. Based on the 2-D geometric model and the definition of SSD, a SSD evolution model in HF etching of fused silica optics is established. The SSD depth distribution of the samples after HF etching was measured by MRF (Magnetorheological Finishing) spotting test, and the results verified the validity of the model. The parameters of the model were also fitted according to the experimental results. This model can be used to predict the processing time of HF etching, ensure the complete removal of SSD, and improve the processing quality and efficiency." @default.
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- W2903662073 date "2019-03-01" @default.
- W2903662073 modified "2023-09-28" @default.
- W2903662073 title "SSD evolution model in HF etching of fused silica optics" @default.
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- W2903662073 doi "https://doi.org/10.1016/j.ijleo.2018.12.067" @default.
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