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- W2903840534 abstract "Antipodal Tapered Slot Antennas (ATSAs) with different polarizations are proposed in this paper. The two kinds of terahertz ATSAs are manufactured based on bulk-silicon process. The ATSAs are composed of an antipodal tapered slots structure and a WR2.2 feeding waveguide, monolithically fabricated by deep reactive-ion etching, sputtering gold and gold-gold thermo-compression bonding. By changing the form of etching curves, the linearly and circularly polarized ATSAs are achieved. The ATSAs realize the pencil beam on the flat aperture, with good symmetry of radiation patterns and high gain, which are suitable for the fields of imaging, detection and wireless communication systems. The good consistency of simulation and test indicates that the bulk silicon process can be applied in small size with high accuracy and meets the processing requirements of the terahertz band." @default.
- W2903840534 created "2018-12-22" @default.
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- W2903840534 date "2018-05-01" @default.
- W2903840534 modified "2023-09-27" @default.
- W2903840534 title "Realization of Terahertz Linearly and Circularly Polarized Antipodal Tapered Slot Antennas Based on Bulk-Silicon Process" @default.
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- W2903840534 doi "https://doi.org/10.1109/icmmt.2018.8563505" @default.
- W2903840534 hasPublicationYear "2018" @default.
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