Matches in SemOpenAlex for { <https://semopenalex.org/work/W2903945809> ?p ?o ?g. }
- W2903945809 abstract "Threading and basal dislocations were observed and their Burgers vectors (b→) were analyzed in 20 µm thick halide vapor phase homoepitaxially grown beta-gallium oxide (β−Ga2O3) films using 15 keV monochromatic synchrotron X-ray topography with symmetric reflection (004) and two asymmetric reflections (205) and (115) in back-reflection and grazing incidence angle geometries, respectively. In a 1 × 1.5 cm2 sample, threading screw dislocations with b→=001 were observed with a density of 30 cm−2, whereas a single threading edge dislocation with b→=100 was observed. Basal dislocations with b→=12112 were observed with a density of ∼20 cm−2, and a single basal dislocation with b→=010 was observed. Rocking curve mapping of the three reflections was also performed on the entire sample with the same setup and a high resolution x-ray camera to obtain the full width at half maximum (FWHM), strain, and curvature maps in two almost orthogonal directions. The epilayer demonstrated excellent crystalline quality with a median FWHM of 8.2 arc sec in the (004) reflection and a very low median strain of ∼|8 × 10−5| obtained from both sample directions. The median radius of curvature was ∼−100 m along the [100] direction and ∼280 m along the [010] sample axis, indicating very low lattice plane curvature that enables high manufacturability and reliability of devices." @default.
- W2903945809 created "2018-12-22" @default.
- W2903945809 creator A5000745448 @default.
- W2903945809 creator A5016014334 @default.
- W2903945809 creator A5018190506 @default.
- W2903945809 creator A5045684716 @default.
- W2903945809 creator A5046116823 @default.
- W2903945809 creator A5068528810 @default.
- W2903945809 creator A5087851383 @default.
- W2903945809 date "2018-12-14" @default.
- W2903945809 modified "2023-10-16" @default.
- W2903945809 title "High-resolution dislocation imaging and micro-structural analysis of HVPE-βGa2O3 films using monochromatic synchrotron topography" @default.
- W2903945809 cites W1492977420 @default.
- W2903945809 cites W1674257804 @default.
- W2903945809 cites W1967921579 @default.
- W2903945809 cites W1999191180 @default.
- W2903945809 cites W2000452909 @default.
- W2903945809 cites W2011662305 @default.
- W2903945809 cites W2019468267 @default.
- W2903945809 cites W2020431932 @default.
- W2903945809 cites W2071906365 @default.
- W2903945809 cites W2074956526 @default.
- W2903945809 cites W2076145011 @default.
- W2903945809 cites W2080104219 @default.
- W2903945809 cites W2086569599 @default.
- W2903945809 cites W2126281778 @default.
- W2903945809 cites W2158045953 @default.
- W2903945809 cites W2259626724 @default.
- W2903945809 cites W2343062165 @default.
- W2903945809 cites W2415488033 @default.
- W2903945809 cites W2518552143 @default.
- W2903945809 cites W2549372522 @default.
- W2903945809 cites W2551166540 @default.
- W2903945809 cites W2553907026 @default.
- W2903945809 cites W2554487074 @default.
- W2903945809 cites W2556340064 @default.
- W2903945809 cites W2609998380 @default.
- W2903945809 cites W2730396179 @default.
- W2903945809 cites W2783668429 @default.
- W2903945809 cites W2790937106 @default.
- W2903945809 cites W2803858421 @default.
- W2903945809 doi "https://doi.org/10.1063/1.5051633" @default.
- W2903945809 hasPublicationYear "2018" @default.
- W2903945809 type Work @default.
- W2903945809 sameAs 2903945809 @default.
- W2903945809 citedByCount "16" @default.
- W2903945809 countsByYear W29039458092019 @default.
- W2903945809 countsByYear W29039458092020 @default.
- W2903945809 countsByYear W29039458092021 @default.
- W2903945809 countsByYear W29039458092022 @default.
- W2903945809 countsByYear W29039458092023 @default.
- W2903945809 crossrefType "journal-article" @default.
- W2903945809 hasAuthorship W2903945809A5000745448 @default.
- W2903945809 hasAuthorship W2903945809A5016014334 @default.
- W2903945809 hasAuthorship W2903945809A5018190506 @default.
- W2903945809 hasAuthorship W2903945809A5045684716 @default.
- W2903945809 hasAuthorship W2903945809A5046116823 @default.
- W2903945809 hasAuthorship W2903945809A5068528810 @default.
- W2903945809 hasAuthorship W2903945809A5087851383 @default.
- W2903945809 hasBestOaLocation W29039458091 @default.
- W2903945809 hasConcept C108649604 @default.
- W2903945809 hasConcept C11665553 @default.
- W2903945809 hasConcept C120665830 @default.
- W2903945809 hasConcept C121332964 @default.
- W2903945809 hasConcept C127813850 @default.
- W2903945809 hasConcept C159122135 @default.
- W2903945809 hasConcept C159985019 @default.
- W2903945809 hasConcept C175017881 @default.
- W2903945809 hasConcept C185592680 @default.
- W2903945809 hasConcept C192562407 @default.
- W2903945809 hasConcept C195065555 @default.
- W2903945809 hasConcept C206744179 @default.
- W2903945809 hasConcept C21368211 @default.
- W2903945809 hasConcept C2524010 @default.
- W2903945809 hasConcept C33923547 @default.
- W2903945809 hasConcept C40833965 @default.
- W2903945809 hasConcept C49040817 @default.
- W2903945809 hasConcept C8010536 @default.
- W2903945809 hasConceptScore W2903945809C108649604 @default.
- W2903945809 hasConceptScore W2903945809C11665553 @default.
- W2903945809 hasConceptScore W2903945809C120665830 @default.
- W2903945809 hasConceptScore W2903945809C121332964 @default.
- W2903945809 hasConceptScore W2903945809C127813850 @default.
- W2903945809 hasConceptScore W2903945809C159122135 @default.
- W2903945809 hasConceptScore W2903945809C159985019 @default.
- W2903945809 hasConceptScore W2903945809C175017881 @default.
- W2903945809 hasConceptScore W2903945809C185592680 @default.
- W2903945809 hasConceptScore W2903945809C192562407 @default.
- W2903945809 hasConceptScore W2903945809C195065555 @default.
- W2903945809 hasConceptScore W2903945809C206744179 @default.
- W2903945809 hasConceptScore W2903945809C21368211 @default.
- W2903945809 hasConceptScore W2903945809C2524010 @default.
- W2903945809 hasConceptScore W2903945809C33923547 @default.
- W2903945809 hasConceptScore W2903945809C40833965 @default.
- W2903945809 hasConceptScore W2903945809C49040817 @default.
- W2903945809 hasConceptScore W2903945809C8010536 @default.
- W2903945809 hasIssue "2" @default.
- W2903945809 hasLocation W29039458091 @default.
- W2903945809 hasLocation W29039458092 @default.
- W2903945809 hasOpenAccess W2903945809 @default.