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• W2904003796 abstract "In-situ plasma processing and characterization approach were developed to remove the hydrocarbon on the niobium and monitor the real-time performance of Nb samples. The inherent synergistic mechanism of Ar and O2 as active plasma detergents to remove hydrocarbon and improve work function was studied. The change of specific chemical speciation and oxide layer caused by plasma processing were investigated through XPS, XRD and RBS. The results showed that the initial cleaning rate of Nb samples improved with the increase of O atoms. And the presence of O+ species could further facilitate the transform from intermediate oxidation state of Nb to its highest oxidation state (Nb2O5, 5.2 eV). Moreover, the role of oxygen could also enhance the thickness of oxide layer from original 7 nm to 23 nm. This study provided a comprehensive understanding of plasma as an effective cleaning technique for niobium cavities." @default.
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• W2904003796 date "2019-05-01" @default.
• W2904003796 modified "2023-10-16" @default.
• W2904003796 title "The mechanism study of mixed Ar/O2 plasma-cleaning treatment on niobium surface for work function improvement" @default.
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• W2904003796 doi "https://doi.org/10.1016/j.apsusc.2018.12.156" @default.
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