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- W2904109811 endingPage "17" @default.
- W2904109811 startingPage "14" @default.
- W2904109811 abstract "Wafer level packaging could reduce the cost of MEMS based sensors through simplified processing and inexpensive components. A novel vacuum tight seal referred to as the wedge seal method is proposed in this paper. The seal consists of a silicon wedge forced into a pliable material (typically a metal) that is attached to the component wafer. The wedge-seal addresses some of the requirements of micro-bolometer packaging in that it provides a vacuum tight seal at low temperatures with tolerance to surface finish and topography. The concept was evaluated with regards to manufacturability, material suitability and performance. A demonstrator model was manufactured with Complementary Metal–Oxide–Semiconductor (CMOS) compatible processing equipment and procedures. The wedge effectively penetrated the metal base and showed promising leak rates." @default.
- W2904109811 created "2018-12-22" @default.
- W2904109811 creator A5023967590 @default.
- W2904109811 creator A5044457734 @default.
- W2904109811 creator A5052399660 @default.
- W2904109811 date "2012-03-01" @default.
- W2904109811 modified "2023-09-26" @default.
- W2904109811 title "Wafer Level Packaging with Wedge Seal Method" @default.
- W2904109811 cites W1552812457 @default.
- W2904109811 cites W2496556150 @default.
- W2904109811 doi "https://doi.org/10.23919/saiee.2012.8531973" @default.
- W2904109811 hasPublicationYear "2012" @default.
- W2904109811 type Work @default.
- W2904109811 sameAs 2904109811 @default.
- W2904109811 citedByCount "0" @default.
- W2904109811 crossrefType "journal-article" @default.
- W2904109811 hasAuthorship W2904109811A5023967590 @default.
- W2904109811 hasAuthorship W2904109811A5044457734 @default.
- W2904109811 hasAuthorship W2904109811A5052399660 @default.
- W2904109811 hasBestOaLocation W29041098111 @default.
- W2904109811 hasConcept C120665830 @default.
- W2904109811 hasConcept C121332964 @default.
- W2904109811 hasConcept C127413603 @default.
- W2904109811 hasConcept C142362112 @default.
- W2904109811 hasConcept C153349607 @default.
- W2904109811 hasConcept C160671074 @default.
- W2904109811 hasConcept C192562407 @default.
- W2904109811 hasConcept C194648553 @default.
- W2904109811 hasConcept C2777755289 @default.
- W2904109811 hasConcept C2780288131 @default.
- W2904109811 hasConcept C37977207 @default.
- W2904109811 hasConcept C47422493 @default.
- W2904109811 hasConcept C49040817 @default.
- W2904109811 hasConcept C62064638 @default.
- W2904109811 hasConcept C78519656 @default.
- W2904109811 hasConceptScore W2904109811C120665830 @default.
- W2904109811 hasConceptScore W2904109811C121332964 @default.
- W2904109811 hasConceptScore W2904109811C127413603 @default.
- W2904109811 hasConceptScore W2904109811C142362112 @default.
- W2904109811 hasConceptScore W2904109811C153349607 @default.
- W2904109811 hasConceptScore W2904109811C160671074 @default.
- W2904109811 hasConceptScore W2904109811C192562407 @default.
- W2904109811 hasConceptScore W2904109811C194648553 @default.
- W2904109811 hasConceptScore W2904109811C2777755289 @default.
- W2904109811 hasConceptScore W2904109811C2780288131 @default.
- W2904109811 hasConceptScore W2904109811C37977207 @default.
- W2904109811 hasConceptScore W2904109811C47422493 @default.
- W2904109811 hasConceptScore W2904109811C49040817 @default.
- W2904109811 hasConceptScore W2904109811C62064638 @default.
- W2904109811 hasConceptScore W2904109811C78519656 @default.
- W2904109811 hasIssue "1" @default.
- W2904109811 hasLocation W29041098111 @default.
- W2904109811 hasOpenAccess W2904109811 @default.
- W2904109811 hasPrimaryLocation W29041098111 @default.
- W2904109811 hasRelatedWork W1621474870 @default.
- W2904109811 hasRelatedWork W1969570385 @default.
- W2904109811 hasRelatedWork W1990064372 @default.
- W2904109811 hasRelatedWork W2061167492 @default.
- W2904109811 hasRelatedWork W2094236328 @default.
- W2904109811 hasRelatedWork W2100299767 @default.
- W2904109811 hasRelatedWork W2149881015 @default.
- W2904109811 hasRelatedWork W2164354707 @default.
- W2904109811 hasRelatedWork W2511280227 @default.
- W2904109811 hasRelatedWork W2513455916 @default.
- W2904109811 hasVolume "103" @default.
- W2904109811 isParatext "false" @default.
- W2904109811 isRetracted "false" @default.
- W2904109811 magId "2904109811" @default.
- W2904109811 workType "article" @default.