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- W2904126870 abstract "This paper presents a low-cost and high-performance humidity sensor using silicon nanowire (SiNW) array. The sensing mechanism is based on the resistance variations due to the adsorption/desorption of water vapor on SiNW array. With the help of traditional microfabrication technology, a large number of low-cost as well as highly controllable SiNW arrays were fabricated, the whole fabrication process is compatible with complementary metal oxide semiconductor (CMOS) technology, such as lithography, reactive ion etching and wet etching. The fabricated SiNW array shows rapid response and high sensitivity to different humidity environments. Our experiments indicated that the signal of SiNW array-based humidity sensor can reach stable in 30 seconds when the humidity changes." @default.
- W2904126870 created "2018-12-22" @default.
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- W2904126870 date "2018-04-01" @default.
- W2904126870 modified "2023-09-28" @default.
- W2904126870 title "High Performance Humidity Sensor by Using Silicon Nanowire Array" @default.
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- W2904126870 doi "https://doi.org/10.1109/nems.2018.8556966" @default.
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