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- W2904235637 abstract "This letter presents the design and electrical performance of integrated power inductors based on thin-film magnetic cores with radial anisotropy induced by <italic xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>in situ</i> magnetic annealing. The magnetic anneal uses an additional coil, as part of the CMOS interconnect below the core, to simultaneously apply a biasing magnetic field and act as a resistive heater. Following annealing, devices demonstrated inductance enhancements as high as 8.8 times the original as-fabricated value, a peak inductance-to-dc resistance <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink><tex-math notation=LaTeX>$(L/R_{{rm{dc}}})$</tex-math></inline-formula> of 348 nH/Ω, a peak volumetric inductance density of 935 nH/mm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sup> , and a peak areal inductance density of 33.4 nH/mm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> . Additional improvements in inductor and bias coil design should further improve device <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink><tex-math notation=LaTeX>$L/ R_{{rm{dc}}}$</tex-math></inline-formula> ratios to greater than 450 nH/Ω." @default.
- W2904235637 created "2018-12-22" @default.
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- W2904235637 date "2019-01-01" @default.
- W2904235637 modified "2023-09-27" @default.
- W2904235637 title "Magnetic Thin-Film Inductors With Induced Radial Anisotropy for Improved Inductance Density" @default.
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- W2904235637 doi "https://doi.org/10.1109/lmag.2018.2887345" @default.
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