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- W2904285428 abstract "To protect sensitive goods such as foods and pharmaceuticals effectively against degradation, respective packaging materials like polyethylene-terephthalate (PET) and polypropylene (PP) often need additional coatings. In this thesis, the potential of PEALD for this application was investigated and demonstrated, also in comparison with other deposition techniques. Besides the development of new, thermally stable molecular Ti compounds for application as precursors in the PEALD of TiO(_{2}) thin films, also the interactions between inorganic oxides and polymeric substrates and the respective interfaces were investigated employing (it {in-situ}) methods. It was shown that the precursor choice has a substantial influence on the final barrier performance. In addition, it was demonstrated that PEALD thin films are capable to promote an improved, successive PECVD-growth of silica-like thin films with low defect amounts." @default.
- W2904285428 created "2018-12-22" @default.
- W2904285428 creator A5047845266 @default.
- W2904285428 date "2018-07-03" @default.
- W2904285428 modified "2023-09-26" @default.
- W2904285428 title "Plasma-enhanced atomic layer deposition of binary metal oxides as gas barrier layers on polymers" @default.
- W2904285428 hasPublicationYear "2018" @default.
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