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- W2904298098 abstract "Tantalum (Ta) exists in body-centered cubic (α phase), tetragonal (β phase), and face-centered cubic (fcc) crystal structures. The β phase is a metastable structure formed in thin films and is often mixed with the α phase. The fcc phase has only previously been reported as dispersed fine grains embedded in α or β phase. In this study, Ta thin films were deposited on silicon substrates by magnetron sputtering. A mixture of α and β phases was observed in the films when the deposition temperature was lower than 400 °C. The β phase content decreased gradually with the increase in deposition temperature, and completely disappeared at 400 °C. It is interesting that when the deposition temperature reached 500 °C, both α and β phases disappeared, and Ta films became a fcc structure. The structure and the stabilization of the fcc Ta thin films were further investigated using X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, and X-ray absorption spectroscopy, and the results are presented in the present paper. This new finding would open new research and application directions for Ta materials." @default.
- W2904298098 created "2018-12-22" @default.
- W2904298098 creator A5015251883 @default.
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- W2904298098 date "2019-01-01" @default.
- W2904298098 modified "2023-10-12" @default.
- W2904298098 title "FCC tantalum thin films deposited by magnetron sputtering" @default.
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- W2904298098 doi "https://doi.org/10.1016/j.surfcoat.2018.12.015" @default.
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