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- W2904342843 abstract "In order to improve the performances of MEMS oscillators, nonlinear behavior of micromechanical resonators are usually avoided or canceled in the most of research work. A new kind of nonlinear phenomenon called amplitude saturation but different from those presented before is found in a T-shape MEMS resonator in this work. Open-loop testing results clearly show the effect of driving conditions on amplitude saturation, and closed-loop results suggest that it can be used to improve the short term frequency stability of MEMS oscillators by an order of magnitude." @default.
- W2904342843 created "2018-12-22" @default.
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- W2904342843 date "2018-04-01" @default.
- W2904342843 modified "2023-09-23" @default.
- W2904342843 title "Study of Amplitude Saturation in T-Shape MEMS Resonators" @default.
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- W2904342843 doi "https://doi.org/10.1109/nems.2018.8556921" @default.
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