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• W2904372944 abstract "We propose to suppress acoustic wave coupling between a Si3N4 membrane resonator and its support structure through cascaded low-frequency resonators fabricated on the silicon substrate of the membrane. The on-chip silicon resonators are designed to ensure that the frequencies of their oscillatory motion are well separated from the mechanical modes of the membrane resonator. Using optical interferometry, we characterize the displacement response of the membrane frame with the vibration isolation; mechanical isolation >30 dB from the mounting surface is achieved. Thus, we reliably fabricate Si3N4 membrane resonators with mechanical quality factors of around 2×106 at room temperature." @default.
• W2904372944 created "2018-12-22" @default.
• W2904372944 creator A5005447276 @default.
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• W2904372944 date "2018-12-12" @default.
• W2904372944 modified "2023-10-16" @default.
• W2904372944 title "Cascaded on-chip phonon shield for membrane microresonators" @default.
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• W2904372944 doi "https://doi.org/10.1364/ao.57.010436" @default.
• W2904372944 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/30645386" @default.
• W2904372944 hasPublicationYear "2018" @default.
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